Shunichi MIKAMI

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Kurokawa-gun, JP

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Patents Grantslast 30 patents

Information Patent Grant
Plasma etching method, pattern forming method and cleaning method
- Patent number 10,290,510
- Issue date May 14, 2019
- Tokyo Electron Limited
- Shunichi Mikami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma etching method and plasma etching apparatus
- Patent number 10,283,368
- Issue date May 7, 2019
- Tokyo Electron Limited
- Shunichi Mikami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dechuck control method and plasma processing apparatus
- Patent number 10,069,443
- Issue date Sep 4, 2018
- Tokyo Electron Limited
- Shigeru Senzaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing method and plasma processing apparatus
- Patent number 9,147,556
- Issue date Sep 29, 2015
- Tokyo Electron Limited
- Shunichi Mikami
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA ETCHING METHOD, PATTERN FORMING METHOD AND CLEANING METHOD
- Publication number 20160300728
- Publication date Oct 13, 2016
- TOKYO ELECTRON LIMITED
- Shunichi MIKAMI
- B08 - CLEANING
Information Patent Application
PLASMA ETCHING METHOD AND PLASMA ETCHING APPARATUS
- Publication number 20160268140
- Publication date Sep 15, 2016
- TOKYO ELECTRON LIMITED
- Shunichi MIKAMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
- Publication number 20140299576
- Publication date Oct 9, 2014
- TOKYO ELECTRON LIMITED
- Shunichi MIKAMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DECHUCK CONTROL METHOD AND PLASMA PROCESSING APPARATUS
- Publication number 20130153147
- Publication date Jun 20, 2013
- TOKYO ELECTRON LIMITED
- Shigeru SENZAKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...