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Charged particle beam device
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Patent number 11,817,289
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Issue date Nov 14, 2023
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HITACHI HIGH-TECH CORPORATION
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Tsunenori Nomaguchi
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H01 - BASIC ELECTRIC ELEMENTS
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Charged particle beam apparatus
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Patent number 11,798,776
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Issue date Oct 24, 2023
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HITACHI HIGH-TECH CORPORATION
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Shunichi Motomura
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H01 - BASIC ELECTRIC ELEMENTS
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Charged particle beam device
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Patent number 11,335,532
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Issue date May 17, 2022
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HITACHI HIGH-TECH CORPORATION
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Tsunenori Nomaguchi
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H01 - BASIC ELECTRIC ELEMENTS
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Charged particle beam device
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Patent number 11,164,716
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Issue date Nov 2, 2021
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HITACHI HIGH-TECH CORPORATION
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Shunichi Motomura
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H01 - BASIC ELECTRIC ELEMENTS
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Charged particle beam device
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Patent number 11,107,656
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Issue date Aug 31, 2021
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HITACHI HIGH-TECH CORPORATION
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Tsunenori Nomaguchi
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H01 - BASIC ELECTRIC ELEMENTS