Shunichi Ogasawara

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Gunma-ken, JP

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Patents Grantslast 30 patents

Information Patent Grant
Wafer rotary holding apparatus and wafer surface treatment apparatu...
- Patent number 6,810,888
- Issue date Nov 2, 2004
- Mimasu Semiconductor Industry Co., Ltd.
- Masato Tsuchiya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer rotary holding apparatus and wafer surface treatment apparatu...
- Patent number 6,672,318
- Issue date Jan 6, 2004
- Mimasu Semiconductor Industry Co., Ltd.
- Masato Tsuchiya
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Wafer rotary holding apparatus and wafer surface treatment apparatu...
- Publication number 20040103931
- Publication date Jun 3, 2004
- Mimasu Semiconductor Industry Co., Ltd.
- Masato Tsuchiya
- H01 - BASIC ELECTRIC ELEMENTS