Shunichi Sano

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Patents Grantslast 30 patents

Information Patent Grant
Charged particle beam exposure apparatus
- Patent number 4,647,782
- Issue date Mar 3, 1987
- Tokyo Shibaura Denki Kabushiki Kaisha
- Hirotsugu Wada
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method of forming by projection an integrated circuit pattern on a...
- Patent number 4,621,371
- Issue date Nov 4, 1986
- Tokyo Shibaura Denki Kabushiki Kaisha
- Mineo Gotou
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Electrostatic chuck plate
- Patent number 4,480,284
- Issue date Oct 30, 1984
- Tokyo Shibaura Denki Kabushiki Kaisha
- Toru Tojo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam type pattern transfer apparatus
- Patent number 4,366,383
- Issue date Dec 28, 1982
- Vlsi Technology Research Association
- Shunichi Sano
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method of coating substrate for liquid crystal display device
- Patent number 4,116,658
- Issue date Sep 26, 1978
- Tokyo Shibaura Electric Co., Ltd.
- Shunichi Sano
- G02 - OPTICS