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Shunichi Uzawa

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  • Setagaya-ku, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    X-ray exposure apparatus and method, semiconductor manufacturing ap...
    • Patent number 6,947,519
    • Issue date Sep 20, 2005
    • Canon Kabushiki Kaisha
    • Kenji Itoga
    • G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
  • Information Patent Grant

    X-ray exposure apparatus, X-ray exposure method, X-ray mask, X-ray...
    • Patent number 6,947,518
    • Issue date Sep 20, 2005
    • Mitsubishi Denki Kabushiki Kaisha
    • Kenji Itoga
    • G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
  • Information Patent Grant

    Exposure method
    • Patent number 6,647,087
    • Issue date Nov 11, 2003
    • Canon Kabushiki Kaisha
    • Mitsuaki Amemiya
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Device manufacturing method
    • Patent number 6,645,707
    • Issue date Nov 11, 2003
    • Canon Kabushiki Kaisha
    • Mitsuaki Amemiya
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Mask structure and method of manufacturing the same
    • Patent number 6,455,203
    • Issue date Sep 24, 2002
    • Canon Kabushiki Kaisha
    • Mitsuaki Amemiya
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Exposure method
    • Patent number 6,327,332
    • Issue date Dec 4, 2001
    • Canon Kabushiki Kaisha
    • Mitsuaki Amemiya
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Exposure method
    • Patent number 6,324,250
    • Issue date Nov 27, 2001
    • Canon Kabushiki Kaisha
    • Mitsuaki Amemiya
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Exposure method and X-ray mask structure for use with the same
    • Patent number 6,272,202
    • Issue date Aug 7, 2001
    • Canon Kabushiki Kaisha
    • Keiko Chiba
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Exposure apparatus for synchrotron radiation lithography
    • Patent number 6,167,111
    • Issue date Dec 26, 2000
    • Canon Kabushiki Kaisha
    • Yutaka Watanabe
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Alignment system
    • Patent number 6,018,395
    • Issue date Jan 25, 2000
    • Canon Kabushiki Kaisha
    • Makiko Mori
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Alignment apparatus and SOR X-ray exposure apparatus having same
    • Patent number 5,822,389
    • Issue date Oct 13, 1998
    • Canon Kabushiki Kaisha
    • Shunichi Uzawa
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Mounting method
    • Patent number 5,687,947
    • Issue date Nov 18, 1997
    • Canon Kabushiki Kaisha
    • Kazunori Iwamoto
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Process for holding an object
    • Patent number 5,680,428
    • Issue date Oct 21, 1997
    • Canon Kabushiki Kaisha
    • Mitsuaki Amemiya
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Substrate conveying device and method of controlling the same
    • Patent number 5,641,264
    • Issue date Jun 24, 1997
    • Canon Kabushiki Kaisha
    • Mitsutoshi Kuno
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Exposure method
    • Patent number 5,610,965
    • Issue date Mar 11, 1997
    • Canon Kabushiki Kaisha
    • Makiko Mori
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Temperature controlling device for mask and wafer holders
    • Patent number 5,577,552
    • Issue date Nov 26, 1996
    • Canon Kabushiki Kaisha
    • Ryuichi Ebinuma
    • G05 - CONTROLLING REGULATING
  • Information Patent Grant

    Gate valve device
    • Patent number 5,566,922
    • Issue date Oct 22, 1996
    • Canon Kabushiki Kaisha
    • Yutaka Tanaka
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Grant

    Alignment apparatus and SOR x-ray exposure apparatus having same
    • Patent number 5,524,131
    • Issue date Jun 4, 1996
    • Canon Kabushiki Kaisha
    • Shunichi Uzawa
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Exposure method
    • Patent number 5,498,501
    • Issue date Mar 12, 1996
    • Canon Kabushiki Kaisha
    • Isamu Shimoda
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Light quantity controlling apparatus
    • Patent number 5,459,573
    • Issue date Oct 17, 1995
    • Canon Kabushiki Kaisha
    • Naoto Abe
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Exposure method
    • Patent number 5,443,932
    • Issue date Aug 22, 1995
    • Canon Kabushiki Kaisha
    • Hirohisa Ohta
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Exposure apparatus
    • Patent number 5,390,227
    • Issue date Feb 14, 1995
    • Canon Kabushiki Kaisha
    • Nobutoshi Mizusawa
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    X-ray mask structure
    • Patent number 5,356,686
    • Issue date Oct 18, 1994
    • Canon Kabushiki Kaisha
    • Hidehiko Fujioka
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Apparatus and process for vacuum-holding an object
    • Patent number 5,329,126
    • Issue date Jul 12, 1994
    • Canon Kabuhiki Kaisha
    • Mitsuaki Amemiya
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    X-ray lithography apparatus including a dose detectable mask
    • Patent number 5,323,440
    • Issue date Jun 21, 1994
    • Canon Kabushiki Kaisha
    • Shinichi Hara
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Exposure apparatus
    • Patent number 5,317,615
    • Issue date May 31, 1994
    • Canon Kabushiki Kaisha
    • Ryuichi Ebinuma
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Exposure apparatus
    • Patent number 5,285,488
    • Issue date Feb 8, 1994
    • Canon Kabushiki Kaisha
    • Yutaka Watanabe
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Substrate conveying apparatus
    • Patent number 5,277,539
    • Issue date Jan 11, 1994
    • Canon Kabushiki Kaisha
    • Shin Matsui
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Exposure system
    • Patent number 5,276,725
    • Issue date Jan 4, 1994
    • Canon Kabushiki Kaisha
    • Eigo Kawakami
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Wafer table and exposure apparatus with the same
    • Patent number 5,231,291
    • Issue date Jul 27, 1993
    • Canon Kabushiki Kaisha
    • Mitsuaki Amemiya
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents