Shunji Kishida

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Thin-film formation device and method
- Patent number 5,793,479
- Issue date Aug 11, 1998
- NEC Corporation
- Kazumi Sugai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming an aluminum film used as an interconnect in a se...
- Patent number 5,545,591
- Issue date Aug 13, 1996
- NEC Corporation
- Kazumi Sugai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for forming a patterned layer by selective chemical vapor de...
- Patent number 5,393,577
- Issue date Feb 28, 1995
- NEC Corporation
- Fumihiko Uesugi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for inducing photochemical reaction
- Patent number 4,976,930
- Issue date Dec 11, 1990
- NEC Corporation
- Shunji Kishida
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...