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Shunji Kuroiwa
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Kanagawa, JP
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Patents Grants
last 30 patents
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Patent Grant
Sputtering apparatus and method, and sputtering control program
Patent number
7,935,232
Issue date
May 3, 2011
Shibaura Mechatronics Corporation
Shunji Kuroiwa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
Sputtering Apparatus and Method, and Sputtering Control Program
Publication number
20080023318
Publication date
Jan 31, 2008
Shunji Kuroiwa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...