Shunji SHINKAWA

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Shizuoka, JP

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Patents Grantslast 30 patents

Information Patent Grant
Electron beam writing apparatus and cathode life span prediction me...
- Patent number 11,749,491
- Issue date Sep 5, 2023
- NuFlare Technology, Inc.
- Satoshi Nakahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Drift measuring method, charged particle beam writing method, and c...
- Patent number 8,507,873
- Issue date Aug 13, 2013
- Nuflare Technology, Inc.
- Shunji Shinkawa
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method of acquiring offset deflection amount for shaped beam and li...
- Patent number 8,008,631
- Issue date Aug 30, 2011
- Nuflare Technology, Inc.
- Takahito Nakayama
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
ELECTRON BEAM WRITING APPARATUS AND CATHODE LIFE SPAN PREDICTION ME...
- Publication number 20220230834
- Publication date Jul 21, 2022
- NuFlare Technology, Inc.
- Satoshi NAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DRIFT MEASURING METHOD, CHARGED PARTICLE BEAM WRITING METHOD, AND C...
- Publication number 20100270475
- Publication date Oct 28, 2010
- NuFlare Technology, Inc.
- Shunji SHINKAWA
- B82 - NANO-TECHNOLOGY
Information Patent Application
METHOD OF ACQUIRING OFFSET DEFLECTION AMOUNT FOR SHAPED BEAM AND LI...
- Publication number 20100001203
- Publication date Jan 7, 2010
- NuFlare Technology, Inc.
- Takahito Nakayama
- B82 - NANO-TECHNOLOGY