Shunji Yoshida

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for feeding a gas for epitaxial growth
- Patent number 6,123,767
- Issue date Sep 26, 2000
- Mitsubishi Materials Silicon Corporation
- Yoshiharu Toyama
- C30 - CRYSTAL GROWTH
Information Patent Grant
Method and apparatus for feeding a gas for epitaxial growth
- Patent number 6,039,809
- Issue date Mar 21, 2000
- Mitsubishi Materials Silicon Corporation
- Yoshiharu Toyama
- C30 - CRYSTAL GROWTH