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Electron energy filter
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Patent number 6,066,852
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Issue date May 23, 2000
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Hitachi, Ltd.
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Shunroku Taya
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H01 - BASIC ELECTRIC ELEMENTS
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Electric multipole lens
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Patent number 4,870,283
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Issue date Sep 26, 1989
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Hitachi, Ltd.
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Shunroku Taya
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H01 - BASIC ELECTRIC ELEMENTS
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Ion implanter
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Patent number 4,634,931
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Issue date Jan 6, 1987
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Hitachi, Ltd.
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Shunroku Taya
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H01 - BASIC ELECTRIC ELEMENTS
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Plasma ion source
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Patent number 4,629,930
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Issue date Dec 16, 1986
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Hitachi, Ltd.
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Noriyuki Sakudo
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H01 - BASIC ELECTRIC ELEMENTS
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Specimens rotating device
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Patent number 4,599,516
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Issue date Jul 8, 1986
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Hitachi, Ltd.
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Shunroku Taya
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H01 - BASIC ELECTRIC ELEMENTS
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Ion implantation apparatus
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Patent number 4,476,393
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Issue date Oct 9, 1984
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Hitachi, Ltd.
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Shunroku Taya
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H01 - BASIC ELECTRIC ELEMENTS