Shunsaku Kubota

Person

  • Kanagawa, JP

Patents Grantslast 30 patents

  • Information Patent Grant

    Mask inspection apparatus

    • Patent number 8,154,719
    • Issue date Apr 10, 2012
    • Nuflare Technology, Inc.
    • Susumu Iida
    • G01 - MEASURING TESTING

Patents Applicationslast 30 patents

  • Information Patent Application

    MASK INSPECTION APPARATUS

    • Publication number 20090244530
    • Publication date Oct 1, 2009
    • Advanced Mask Inspection Technology, Inc.
    • Susumu Iida
    • G01 - MEASURING TESTING