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Shunsaku Kubota
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Kanagawa, JP
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last 30 patents
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Patent Grant
Mask inspection apparatus
Patent number
8,154,719
Issue date
Apr 10, 2012
Nuflare Technology, Inc.
Susumu Iida
G01 - MEASURING TESTING
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last 30 patents
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Patent Application
MASK INSPECTION APPARATUS
Publication number
20090244530
Publication date
Oct 1, 2009
Advanced Mask Inspection Technology, Inc.
Susumu Iida
G01 - MEASURING TESTING