Shunsuke Ishida

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Miyagi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Plasma etching method and plasma etching apparatus
- Patent number 9,209,034
- Issue date Dec 8, 2015
- Tokyo Electron Limited
- Akinori Kitamura
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA ETCHING METHOD AND PLASMA ETCHING APPARATUS
- Publication number 20150024603
- Publication date Jan 22, 2015
- TOKYO ELECTRON LIMITED
- Akinori Kitamura
- H01 - BASIC ELECTRIC ELEMENTS