Shunsuke MATSUZAWA

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Unit control panel, substrate transfer test method, and substrate p...
- Patent number 9,849,488
- Issue date Dec 26, 2017
- Ebara Corporation
- Shunsuke Matsuzawa
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE CLEANING APPARATUS AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20170236730
- Publication date Aug 17, 2017
- EBARA CORPORATION
- Akira IMAMURA
- B08 - CLEANING
Information Patent Application
UNIT CONTROL PANEL, SUBSTRATE TRANSFER TEST METHOD, AND SUBSTRATE P...
- Publication number 20150071742
- Publication date Mar 12, 2015
- EBARA CORPORATION
- Shunsuke MATSUZAWA
- B08 - CLEANING