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Shunsuke Mikuriya
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Tokyo, JP
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Patents Grants
last 30 patents
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Patent Grant
Method for polishing silicon wafer and polishing liquid therefor
Patent number
8,932,952
Issue date
Jan 13, 2015
Sumco Corporation
Shinichi Ogata
B24 - GRINDING POLISHING
Information
Patent Grant
Wafer polishing method
Patent number
8,900,033
Issue date
Dec 2, 2014
Sumco Corporation
Kazushige Takaishi
B24 - GRINDING POLISHING
Information
Patent Grant
Method for producing epitaxial silicon wafer
Patent number
8,728,942
Issue date
May 20, 2014
Sumico Corporation
Shinichi Ogata
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
METHOD FOR POLISHING SILICON WAFER AND POLISHING LIQUID THEREFOR
Publication number
20130032573
Publication date
Feb 7, 2013
SUMCO CORPORATION
Shinichi Ogata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
WAFER POLISHING METHOD
Publication number
20130017763
Publication date
Jan 17, 2013
Kazushige Takaishi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR PRODUCING EPITAXIAL SILICON WAFER
Publication number
20120156878
Publication date
Jun 21, 2012
SUMCO CORPORATION
Shinichi Ogata
H01 - BASIC ELECTRIC ELEMENTS