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Shunsuke Nakai
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Kanagawa-ken, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Processing end point detection method, polishing method, and polish...
Patent number
10,207,390
Issue date
Feb 19, 2019
TOSHIBA MEMORY CORPORATION
Noburu Shimizu
B24 - GRINDING POLISHING
Information
Patent Grant
Processing end point detection method, polishing method, and polish...
Patent number
8,554,356
Issue date
Oct 8, 2013
Ebara Corporation
Noburu Shimizu
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing state monitoring method
Patent number
8,342,907
Issue date
Jan 1, 2013
Ebara Corporation
Yoichi Kobayashi
B24 - GRINDING POLISHING
Information
Patent Grant
Substrate film thickness measurement method, substrate film thickne...
Patent number
7,675,634
Issue date
Mar 9, 2010
Ebara Corporation
Toshifumi Kimba
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing state monitoring apparatus and polishing apparatus
Patent number
7,645,181
Issue date
Jan 12, 2010
Ebara Corporation
Yoichi Kobayashi
B24 - GRINDING POLISHING
Information
Patent Grant
Substrate polishing apparatus
Patent number
7,585,204
Issue date
Sep 8, 2009
Ebara Corporation
Yoichi Kobayashi
B24 - GRINDING POLISHING
Information
Patent Grant
Substrate polishing apparatus
Patent number
7,547,242
Issue date
Jun 16, 2009
Ebara Corporation
Kazuto Hirokawa
B24 - GRINDING POLISHING
Information
Patent Grant
Substrate polishing apparatus
Patent number
7,510,460
Issue date
Mar 31, 2009
Ebara Corporation
Yoichi Kobayashi
B24 - GRINDING POLISHING
Information
Patent Grant
Substrate polishing apparatus
Patent number
7,507,144
Issue date
Mar 24, 2009
Ebara Corporation
Kazuto Hirokawa
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing state monitoring method
Patent number
7,438,627
Issue date
Oct 21, 2008
Ebara Corporation
Yoichi Kobayashi
B24 - GRINDING POLISHING
Information
Patent Grant
Substrate film thickness measurement method, substrate film thickne...
Patent number
7,428,064
Issue date
Sep 23, 2008
Ebara Corporation
Toshifumi Kimba
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing state monitoring apparatus and polishing apparatus and me...
Patent number
7,252,575
Issue date
Aug 7, 2007
Ebara Corporation
Yoichi Kobayashi
B24 - GRINDING POLISHING
Information
Patent Grant
Substrate polishing apparatus
Patent number
7,241,202
Issue date
Jul 10, 2007
Ebara Corporation
Yoichi Kobayashi
B24 - GRINDING POLISHING
Information
Patent Grant
Substrate polishing apparatus
Patent number
7,214,122
Issue date
May 8, 2007
Ebara Corporation
Kazuto Hirokawa
B24 - GRINDING POLISHING
Information
Patent Grant
Substrate polishing apparatus
Patent number
7,101,257
Issue date
Sep 5, 2006
Ebara Corporation
Kazuto Hirokawa
B24 - GRINDING POLISHING
Information
Patent Grant
Substrate film thickness measurement method, substrate film thickne...
Patent number
7,072,050
Issue date
Jul 4, 2006
Ebara Corporation
Toshifumi Kimba
B24 - GRINDING POLISHING
Information
Patent Grant
Substrate polishing apparatus
Patent number
6,942,543
Issue date
Sep 13, 2005
Ebara Corporation
Yoichi Kobayashi
B24 - GRINDING POLISHING
Information
Patent Grant
Substrate film thickness measurement method, substrate film thickne...
Patent number
6,785,010
Issue date
Aug 31, 2004
Ebara Corporation
Toshifumi Kimba
B24 - GRINDING POLISHING
Information
Patent Grant
Substrate polishing apparatus
Patent number
6,758,723
Issue date
Jul 6, 2004
Ebara Corporation
Yoichi Kobayashi
B24 - GRINDING POLISHING
Information
Patent Grant
Method and apparatus for measuring film thickness
Patent number
6,657,737
Issue date
Dec 2, 2003
Ebara Corporation
Toshifumi Kimba
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
COMMUNICATION DEVICE
Publication number
20220166448
Publication date
May 26, 2022
SONY GROUP CORPORATION
Shunsuke NAKAI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PROCESSING END POINT DETECTION METHOD, POLISHING METHOD, AND POLISH...
Publication number
20140004773
Publication date
Jan 2, 2014
Kabushiki Kaisha Toshiba
Noburu SHIMIZU
G01 - MEASURING TESTING
Information
Patent Application
POLISHING STATE MONITORING APPARATUS AND POLISHING APPARATUS AND ME...
Publication number
20100075576
Publication date
Mar 25, 2010
Yoichi Kobayashi
B24 - GRINDING POLISHING
Information
Patent Application
Processing end point detection method, polishing method,and polishi...
Publication number
20100015889
Publication date
Jan 21, 2010
Noburu Shimizu
G05 - CONTROLLING REGULATING
Information
Patent Application
SUBSTRATE POLISHING APPARATUS
Publication number
20090191790
Publication date
Jul 30, 2009
Yoichi Kobayashi
B24 - GRINDING POLISHING
Information
Patent Application
Substrate film thickness measurement method, substrate film thickne...
Publication number
20090051939
Publication date
Feb 26, 2009
Toshifumi Kimba
B08 - CLEANING
Information
Patent Application
Polishing state monitoring apparatus and polishing apparatus and me...
Publication number
20090011680
Publication date
Jan 8, 2009
Yoichi Kobayashi
B24 - GRINDING POLISHING
Information
Patent Application
Polishing state monitoring apparatus and polishing apparatus and me...
Publication number
20070254557
Publication date
Nov 1, 2007
Yoichi Kobayashi
B24 - GRINDING POLISHING
Information
Patent Application
Substrate polishing apparatus
Publication number
20070254565
Publication date
Nov 1, 2007
Yoichi Kobayashi
B24 - GRINDING POLISHING
Information
Patent Application
Substrate polishing apparatus
Publication number
20070173177
Publication date
Jul 26, 2007
Kazuto Hirokawa
B24 - GRINDING POLISHING
Information
Patent Application
Substrate polishing apparatus
Publication number
20070042679
Publication date
Feb 22, 2007
Kazuto Hirokawa
B24 - GRINDING POLISHING
Information
Patent Application
Substrate film thickness measurement method, substrate film thickne...
Publication number
20060209308
Publication date
Sep 21, 2006
Toshifumi Kimba
B08 - CLEANING
Information
Patent Application
Polishing state monitoring apparatus and polishing apparatus and me...
Publication number
20060166606
Publication date
Jul 27, 2006
Yoichi Kobayashi
B24 - GRINDING POLISHING
Information
Patent Application
Substrate polishing apparatus
Publication number
20060105679
Publication date
May 18, 2006
Kazuto Hirokawa
B24 - GRINDING POLISHING
Information
Patent Application
Substrate polishing apparatus
Publication number
20050239372
Publication date
Oct 27, 2005
Yoichi Kobayashi
B24 - GRINDING POLISHING
Information
Patent Application
Substrate polishing apparatus
Publication number
20040242121
Publication date
Dec 2, 2004
Kazuto Hirokawa
B24 - GRINDING POLISHING
Information
Patent Application
Substrate polishing apparatus
Publication number
20040235393
Publication date
Nov 25, 2004
Kazuto Hirokawa
B24 - GRINDING POLISHING
Information
Patent Application
Substrate film thickness measurement method, substrate film thickne...
Publication number
20040223166
Publication date
Nov 11, 2004
Toshifumi Kimba
B08 - CLEANING
Information
Patent Application
Substrate polishing apparatus
Publication number
20040219865
Publication date
Nov 4, 2004
Yoichi Kobayashi
B24 - GRINDING POLISHING
Information
Patent Application
Substrate polishing apparatus
Publication number
20030124957
Publication date
Jul 3, 2003
Yoichi Kobayashi
B24 - GRINDING POLISHING
Information
Patent Application
Method and apparatus for measuring film thickness
Publication number
20010052987
Publication date
Dec 20, 2001
Toshifumi Kimba
G01 - MEASURING TESTING
Information
Patent Application
Substrate film thickness measurement method, substrate film thickne...
Publication number
20010005265
Publication date
Jun 28, 2001
Toshifumi Kimba
G01 - MEASURING TESTING