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Shunsuke Ochiai
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Mie-ken, JP
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last 30 patents
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Patent Grant
Pattern forming method and mask pattern data
Patent number
9,244,343
Issue date
Jan 26, 2016
Kabushiki Kaisha Toshiba
Ryoji Yoshikawa
B82 - NANO-TECHNOLOGY
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last 30 patents
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PATTERN FORMING METHOD AND MASK PATTERN DATA
Publication number
20150021295
Publication date
Jan 22, 2015
Kabushiki Kaisha Toshiba
Ryoji YOSHIKAWA
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL