Shunta FURUTANI

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Yamaguchi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Dry etching method and method for producing semiconductor device
- Patent number 12,154,791
- Issue date Nov 26, 2024
- Central Glass Company, Limited
- Hiroyuki Oomori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etching method and apparatus
- Patent number 11,594,417
- Issue date Feb 28, 2023
- Tokyo Electron Limited
- Kazuhito Miyata
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Dry Etching Method and Method for Producing Semiconductor Device
- Publication number 20220157614
- Publication date May 19, 2022
- Central Glass Company, Limited
- Hiroyuki OOMORI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING METHOD AND APPARATUS
- Publication number 20200395219
- Publication date Dec 17, 2020
- TOKYO ELECTRON LIMITED
- Kazuhito MIYATA
- H01 - BASIC ELECTRIC ELEMENTS