Shuo Na

Person

Sunnyvale, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method and system for identifying a clean endpoint time for a chamber
- Patent number 10,309,013
- Issue date Jun 4, 2019
- Applied Materials, Inc.
- Ilias Iliopoulos
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chamber leak and gas contaimination detection
- Patent number 10,269,601
- Issue date Apr 23, 2019
- Applied Materials, Inc.
- Shuo Julia Na
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Detection of grounding strap breakage
- Patent number 10,002,748
- Issue date Jun 19, 2018
- Applied Materials, Inc.
- Ilias Iliopoulos
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Application of in-line glass edge-inspection and alignment check in...
- Patent number 9,704,762
- Issue date Jul 11, 2017
- Applied Materials, Inc.
- Ilias Iliopoulos
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Detecting arcing using processing chamber data
- Patent number 9,653,269
- Issue date May 16, 2017
- Applied Materials, Inc.
- Shuo Na
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
CHAMBER LEAK AND GAS CONTAIMINATION DETECTION
- Publication number 20170107610
- Publication date Apr 20, 2017
- Shuo Julia NA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DETECTION OF GROUNDING STRAP BREAKAGE
- Publication number 20150221484
- Publication date Aug 6, 2015
- Applied Materials, Inc.
- Ilias ILIOPOULOS
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPLICATION OF IN-LINE GLASS EDGE-INSPECTION AND ALIGNMENT CHECK IN...
- Publication number 20150221563
- Publication date Aug 6, 2015
- Applied Materials, Inc.
- Ilias ILIOPOULOS
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPLICATION OF IN-LINE THICKNESS METROLOGY AND CHAMBER MATCHING IN...
- Publication number 20150219565
- Publication date Aug 6, 2015
- Applied Materials, Inc.
- Ilias ILIOPOULOS
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DETECTION OF SUBSTRATE DEFECTS BY TRACKING PROCESSING PARAMETERS
- Publication number 20150147830
- Publication date May 28, 2015
- Applied Materials, Inc.
- Ilias ILIOPOULOS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DETECTING ARCING USING PROCESSING CHAMBER DATA
- Publication number 20150048862
- Publication date Feb 19, 2015
- Applied Materials, Inc.
- Shuo NA
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND SYSTEM FOR IDENTIFYING A CLEAN ENDPOINT TIME FOR A CHAMBER
- Publication number 20140279750
- Publication date Sep 18, 2014
- Applied Materials, Inc.
- Ilias Iliopoulos
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Person

Patents Grantslast 30 patents

Method and system for identifying a clean endpoint time for a chamber

Chamber leak and gas contaimination detection

Detection of grounding strap breakage

Application of in-line glass edge-inspection and alignment check in...

Detecting arcing using processing chamber data

Patents Applicationslast 30 patents

CHAMBER LEAK AND GAS CONTAIMINATION DETECTION

DETECTION OF GROUNDING STRAP BREAKAGE

APPLICATION OF IN-LINE GLASS EDGE-INSPECTION AND ALIGNMENT CHECK IN...

APPLICATION OF IN-LINE THICKNESS METROLOGY AND CHAMBER MATCHING IN...

DETECTION OF SUBSTRATE DEFECTS BY TRACKING PROCESSING PARAMETERS

DETECTING ARCING USING PROCESSING CHAMBER DATA

METHOD AND SYSTEM FOR IDENTIFYING A CLEAN ENDPOINT TIME FOR A CHAMBER