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Shuo Sun
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Fremont, CA, US
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Patents Grants
last 30 patents
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Patent Grant
Methods and systems for selecting recipe for defect inspection
Patent number
10,338,002
Issue date
Jul 2, 2019
KLA-Tencor Corporation
Robert M. Danen
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Repeater detection
Patent number
9,766,187
Issue date
Sep 19, 2017
KLA-Tencor Corp.
Hong Chen
G01 - MEASURING TESTING
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Patent Grant
Defect detection using structural information
Patent number
9,727,047
Issue date
Aug 8, 2017
KLA-Tencor Corp.
Qing Luo
G05 - CONTROLLING REGULATING
Patents Applications
last 30 patents
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Patent Application
Defect Detection Using Structural Information
Publication number
20160104600
Publication date
Apr 14, 2016
KLA-Tencor Corporation
Qing Luo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Repeater Detection
Publication number
20160061745
Publication date
Mar 3, 2016
KLA-Tencor Corporation
Hong Chen
G01 - MEASURING TESTING