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Shusaku Maeda

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Patents Grantslast 30 patents

  • Information Patent Grant

    Charged particle beam device
    • Patent number 8,558,193
    • Issue date Oct 15, 2013
    • Hitachi High-Technologies Corporation
    • Shusaku Maeda
    • G01 - MEASURING TESTING

Patents Applicationslast 30 patents

  • Information Patent Application

    CHARGED PARTICLE BEAM DEVICE
    • Publication number 20120112068
    • Publication date May 10, 2012
    • Shusaku Maeda
    • G01 - MEASURING TESTING