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Shusei KATO

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  • Miyagi, JP
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Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    SUBSTRATE TREATMENT SYSTEM
    • Publication number 20250226189
    • Publication date Jul 10, 2025
    • TOKYO ELECTRON LIMITED
    • Toshiki AKAMA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SUBSTRATE PROCESSING SYSTEM
    • Publication number 20250104979
    • Publication date Mar 27, 2025
    • TOKYO ELECTRON LIMITED
    • Toshiki AKAMA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SUBSTRATE PROCESSING SYSTEM AND METHOD FOR INSTALLING EDGE RING
    • Publication number 20250079138
    • Publication date Mar 6, 2025
    • TOKYO ELECTRON LIMITED
    • Takashi ARAMAKI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20230207282
    • Publication date Jun 29, 2023
    • TOKYO ELECTRON LIMITED
    • Shusei KATO
    • H01 - BASIC ELECTRIC ELEMENTS