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last 30 patents
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Patent Grant
Pattern-forming method and composition for resist pattern-refinement
Patent number
10,216,090
Issue date
Feb 26, 2019
JSR Corporation
Kanako Meya
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
RADIATION-SENSITIVE RESIN COMPOSITION AND RESIST PATTERN-FORMING ME...
Publication number
20220260908
Publication date
Aug 18, 2022
JSR Corporation
Tetsurou KANEKO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
RADIATION-SENSITIVE RESIN COMPOSITION AND RESIST PATTERN-FORMING ME...
Publication number
20210389671
Publication date
Dec 16, 2021
JSR Corporation
Tetsurou KANEKO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
RADIATION-SENSITIVE RESIN COMPOSITION AND METHOD FOR FORMING RESIST...
Publication number
20210364918
Publication date
Nov 25, 2021
JSR Corporation
Katsuaki Nishikori
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PATTERN-FORMING METHOD AND COMPOSITION FOR RESIST PATTERN-REFINEMENT
Publication number
20190155162
Publication date
May 23, 2019
JSR Corporation
Kanako MEYA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PATTERN-FORMING METHOD AND COMPOSITION FOR RESIST PATTERN-REFINEMENT
Publication number
20160291462
Publication date
Oct 6, 2016
JSR Corporation
Kanako MEYA
H01 - BASIC ELECTRIC ELEMENTS