Shuuzoo Sano

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Yokohama, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for microwave assisting sputtering
- Patent number 4,721,553
- Issue date Jan 26, 1988
- Hitachi, Ltd.
- Hiroshi Saito
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...