Shuzo Hebiguchi

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method of forming fluorine-doped low-dielectric-constant insulating...
- Patent number 7,037,855
- Issue date May 2, 2006
- ASM Japan K.K.
- Naoto Tsuji
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF FORMING FLUORINE-DOPED LOW-DIELECTRIC-CONSTANT INSULATING...
- Publication number 20060046519
- Publication date Mar 2, 2006
- ASM JAPAN K.K.
- Naoto Tsuji
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...