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Shuzo Matsuno
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Tokyo, JP
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last 30 patents
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Patent Grant
Pattern inspection method and apparatus, and pattern alignment method
Patent number
7,349,575
Issue date
Mar 25, 2008
Nippon Avionics Co., Ltd.
Shinichi Hattori
G06 - COMPUTING CALCULATING COUNTING
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last 30 patents
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Patent Application
Pattern inspection method and apparatus, and pattern alignment method
Publication number
20040264759
Publication date
Dec 30, 2004
Shinichi Hattori
G06 - COMPUTING CALCULATING COUNTING