Shuzo Nagami

Person

Kyoto, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate cleaning and drying apparatus
- Patent number 7,415,985
- Issue date Aug 26, 2008
- Dainippon Screen Mfg. Co., Ltd.
- Shuzo Nagami
- B08 - CLEANING
Information Patent Grant
Substrate treating method and apparatus
- Patent number 6,941,956
- Issue date Sep 13, 2005
- Dainippon Screen Mfg. Co., Ltd.
- Atsushi Osawa
- B08 - CLEANING
Information Patent Grant
Method of removing metal ion and apparatus for treating substrate
- Patent number 6,902,677
- Issue date Jun 7, 2005
- Dainippon Screen Mfg. Co., Ltd.
- Shuzo Nagami
- C02 - TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20080210261
- Publication date Sep 4, 2008
- Dainippon Screen Mfg. Co., Ltd.
- Shuzo Nagami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate treating apparatus
- Publication number 20060137726
- Publication date Jun 29, 2006
- Dainippon Screen Mfg. Co., Ltd.
- Kenichi Sano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Substrate treating apparatus and method
- Publication number 20060130880
- Publication date Jun 22, 2006
- Dainippon Screen Mfg. Co., Ltd.
- Shuzo Nagami
- B08 - CLEANING
Information Patent Application
Method and apparatus for substrate processing
- Publication number 20060112973
- Publication date Jun 1, 2006
- Dainippon Screen Mfg. Co., Ltd.
- Shuzo Nagami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing apparatus and substrate processing method
- Publication number 20050274401
- Publication date Dec 15, 2005
- Dainippon Screen Mfg. Co., Ltd.
- Shuzo Nagami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate treating method and apparatus
- Publication number 20050236018
- Publication date Oct 27, 2005
- Dainippon Screen Mfg. Co., Ltd.
- Shuzo Nagami
- B08 - CLEANING
Information Patent Application
Substrate cleaning and drying apparatus
- Publication number 20050056307
- Publication date Mar 17, 2005
- Dainippon Screen Mfg. Co., Ltd.
- Shuzo Nagami
- B08 - CLEANING
Information Patent Application
Substrate treating apparatus and substrate treating method
- Publication number 20040112410
- Publication date Jun 17, 2004
- Dainippon Screen Mfg. Co., Ltd.
- Hiroyuki Araki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing apparatus and substrate processing method
- Publication number 20040060505
- Publication date Apr 1, 2004
- Dainippon Screen Mfg. Co., Ltd.
- Shuzo Nagami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of removing metal ion and apparatus for treating substrate
- Publication number 20040055967
- Publication date Mar 25, 2004
- Dainippon Screen Mfg. Co., Ltd.
- Shuzo Nagami
- C02 - TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
Information Patent Application
Substrate treating method and apparatus
- Publication number 20030176078
- Publication date Sep 18, 2003
- Dainippon Screen Mfg. Co., Ltd.
- Atsushi Osawa
- B08 - CLEANING

Shuzo Nagami

Person

Patents Grantslast 30 patents

Substrate cleaning and drying apparatus

Substrate treating method and apparatus

Method of removing metal ion and apparatus for treating substrate

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

Substrate treating apparatus

Substrate treating apparatus and method

Method and apparatus for substrate processing

Substrate processing apparatus and substrate processing method

Substrate treating method and apparatus

Substrate cleaning and drying apparatus

Substrate treating apparatus and substrate treating method

Substrate processing apparatus and substrate processing method

Method of removing metal ion and apparatus for treating substrate

Substrate treating method and apparatus