Shyam Sridhar

Person

Albany, NY, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method for gate stack formation and etching
- Patent number 12,009,430
- Issue date Jun 11, 2024
- Tokyo Electron Limited
- Sergey Voronin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for resistive RAM (ReRAM) performance stabilization via dry...
- Patent number 11,637,242
- Issue date Apr 25, 2023
- Tokyo Electron Limited
- Sergey Voronin
- G11 - INFORMATION STORAGE
Information Patent Grant
Plasma etch processes
- Patent number 11,398,386
- Issue date Jul 26, 2022
- Tokyo Electron Limited
- Yusuke Yoshida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method to achieve a sidewall etch
- Patent number 10,811,269
- Issue date Oct 20, 2020
- Tokyo Electron Limited
- Shyam Sridhar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of plasma etching of silicon-containing organic film using s...
- Patent number 10,529,589
- Issue date Jan 7, 2020
- Tokyo Electron Limited
- Erdinc Karakas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Selective SiARC removal
- Patent number 10,115,591
- Issue date Oct 30, 2018
- Tokyo Electron Limited
- Shyam Sridhar
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Topographic Selective Deposition
- Publication number 20240395507
- Publication date Nov 28, 2024
- TOKYO ELECTRON LIMITED
- Shyam Sridhar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Balanced RF Resonant Antenna System
- Publication number 20240363310
- Publication date Oct 31, 2024
- TOKYO ELECTRON LIMITED
- Qiang Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING SYSTEMS WITH MATCHING NETWORK AND METHODS
- Publication number 20240339297
- Publication date Oct 10, 2024
- TOKYO ELECTRON LIMITED
- Qiang Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma Processing Methods Using Multiphase Multifrequency Bias Pulses
- Publication number 20230411116
- Publication date Dec 21, 2023
- TOKYO ELECTRON LIMITED
- Ya-Ming Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA SYSTEMS AND PROCESSES WITH PULSED MAGNETIC FIELD
- Publication number 20230377853
- Publication date Nov 23, 2023
- TOKYO ELECTRON LIMITED
- Ya-Ming Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA ETCHING USING MULTIPHASE MULTIFREQUENCY POWER PULSES AND VAR...
- Publication number 20230377895
- Publication date Nov 23, 2023
- TOKYO ELECTRON LIMITED
- Ya-Ming Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of Uniformity Control
- Publication number 20230377849
- Publication date Nov 23, 2023
- TOKYO ELECTRON LIMITED
- Shyam Sridhar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR RESISTIVE RAM (ReRAM) PERFORMANCE STABILIZATION VIA DRY...
- Publication number 20220059765
- Publication date Feb 24, 2022
- TOKYO ELECTRON LIMITED
- Sergey Voronin
- G11 - INFORMATION STORAGE
Information Patent Application
METHOD FOR GATE STACK FORMATION AND ETCHING
- Publication number 20200273992
- Publication date Aug 27, 2020
- TOKYO ELECTRON LIMITED
- Sergey Voronin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA ETCH PROCESSES
- Publication number 20200273711
- Publication date Aug 27, 2020
- TOKYO ELECTRON LIMITED
- Yusuke Yoshida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD TO ACHIEVE A SIDEWALL ETCH
- Publication number 20190259623
- Publication date Aug 22, 2019
- TOKYO ELECTRON LIMITED
- Shyam Sridhar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF PLASMA ETCHING OF SILICON-CONTAINING ORGANIC FILM USING S...
- Publication number 20180358233
- Publication date Dec 13, 2018
- TOKYO ELECTRON LIMITED
- Erdinc Karakas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Selective SiARC Removal
- Publication number 20180197730
- Publication date Jul 12, 2018
- TOKYO ELECTRON LIMITED
- Shyam Sridhar
- H01 - BASIC ELECTRIC ELEMENTS

Shyam Sridhar

Person

Patents Grantslast 30 patents

Method for gate stack formation and etching

Methods for resistive RAM (ReRAM) performance stabilization via dry...

Plasma etch processes

Method to achieve a sidewall etch

Method of plasma etching of silicon-containing organic film using s...

Selective SiARC removal

Patents Applicationslast 30 patents

Topographic Selective Deposition

Balanced RF Resonant Antenna System

PLASMA PROCESSING SYSTEMS WITH MATCHING NETWORK AND METHODS

Plasma Processing Methods Using Multiphase Multifrequency Bias Pulses

PLASMA SYSTEMS AND PROCESSES WITH PULSED MAGNETIC FIELD

PLASMA ETCHING USING MULTIPHASE MULTIFREQUENCY POWER PULSES AND VAR...

Method of Uniformity Control

METHODS FOR RESISTIVE RAM (ReRAM) PERFORMANCE STABILIZATION VIA DRY...

METHOD FOR GATE STACK FORMATION AND ETCHING

PLASMA ETCH PROCESSES

METHOD TO ACHIEVE A SIDEWALL ETCH

METHOD OF PLASMA ETCHING OF SILICON-CONTAINING ORGANIC FILM USING S...

Selective SiARC Removal