Shyeu Sheng Lu

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Hsin-Chu, TW

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Patents Grantslast 30 patents

Information Patent Grant
Method for improved metrology by protecting photoresist profiles
- Patent number 7,374,956
- Issue date May 20, 2008
- Taiwan Semiconductor Manufacturing Co. Ltd.
- Shyeu Sheng Lu
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Method for improved metrology of photoresist profiles
- Publication number 20040018648
- Publication date Jan 29, 2004
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Shyeu Sheng Lu
- H01 - BASIC ELECTRIC ELEMENTS