Shyh-Shin Ferng

Person

Hsin-Chu, TW

People

Patents Grantslast 30 patents

Information Patent Grant
Semiconductor device and method of manufacturing
- Patent number 11,658,245
- Issue date May 23, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Shyh-Shin Ferng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Test key design to enable X-ray scatterometry measurement
- Patent number 11,071,513
- Issue date Jul 27, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd
- Shyh-Shin Ferng
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Non-contact method to monitor and quantify effective work function...
- Patent number 10,763,179
- Issue date Sep 1, 2020
- SEMILAB Semiconductor Physics Laboratory Co., Ltd.
- Dmitriy Marinskiy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Test key design to enable X-ray scatterometry measurement
- Patent number 10,499,876
- Issue date Dec 10, 2019
- Taiwan Semiconductor Manufacturing Company, Ltd
- Shyh-Shin Ferng
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
X-ray reflectometry apparatus for samples with a miniscule measurem...
- Patent number 10,151,713
- Issue date Dec 11, 2018
- Industrial Technology Research Institute
- Wen-Li Wu
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Semiconductor Device and Method of Manufacturing
- Publication number 20220359766
- Publication date Nov 10, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Shyh-Shin Ferng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING
- Publication number 20210126134
- Publication date Apr 29, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Shyh-Shin Ferng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Test Key Design to Enable X-Ray Scatterometry Measurement
- Publication number 20200037979
- Publication date Feb 6, 2020
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shyh-Shin Ferng
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Test Key Design to Enable X-Ray Scatterometry Measurement
- Publication number 20190029634
- Publication date Jan 31, 2019
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shyh-Shin Ferng
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
X-RAY REFLECTOMETRY APPARATUS FOR SAMPLES WITH A MINISCULE MEASUREM...
- Publication number 20160341674
- Publication date Nov 24, 2016
- Industrial Technology Research Institute
- Wen-Li WU
- G01 - MEASURING TESTING
Information Patent Application
NON-CONTACT METHOD TO MONITOR AND QUANTIFY EFFECTIVE WORK FUNCTION...
- Publication number 20160252565
- Publication date Sep 1, 2016
- Semilab SDI LLC
- Dmitriy Marinskiy
- G01 - MEASURING TESTING

Shyh-Shin Ferng

Person

Patents Grantslast 30 patents

Semiconductor device and method of manufacturing

Test key design to enable X-ray scatterometry measurement

Non-contact method to monitor and quantify effective work function...

Test key design to enable X-ray scatterometry measurement

X-ray reflectometry apparatus for samples with a miniscule measurem...

Patents Applicationslast 30 patents

Semiconductor Device and Method of Manufacturing

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING

Test Key Design to Enable X-Ray Scatterometry Measurement

Test Key Design to Enable X-Ray Scatterometry Measurement

X-RAY REFLECTOMETRY APPARATUS FOR SAMPLES WITH A MINISCULE MEASUREM...

NON-CONTACT METHOD TO MONITOR AND QUANTIFY EFFECTIVE WORK FUNCTION...