Shyh-Wei Cheng

Person

Zhudong Township, TW

People

Patents Grantslast 30 patents

Information Patent Grant
Anti-stiction process for MEMS device
- Patent number 12,157,667
- Issue date Dec 3, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Jui-Chun Weng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Inter-poly connection for parasitic capacitor and die size improvement
- Patent number 11,407,636
- Issue date Aug 9, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd
- Shyh-Wei Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Anti-stiction process for MEMS device
- Patent number 11,305,980
- Issue date Apr 19, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Jui-Chun Weng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for forming semiconductor device structure with conductive line
- Patent number 10,879,186
- Issue date Dec 29, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chi-Cherng Jeng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for forming semiconductor device structure with conductive line
- Patent number 10,770,401
- Issue date Sep 8, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chi-Cherng Jeng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heater design for MEMS chamber pressure control
- Patent number 10,532,925
- Issue date Jan 14, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Shyh-Wei Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Anti-stiction process for MEMS device
- Patent number 10,513,432
- Issue date Dec 24, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Jui-Chun Weng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for forming semiconductor device structure with conductive line
- Patent number 10,510,671
- Issue date Dec 17, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chi-Cherng Jeng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inter-poly connection for parasitic capacitor and die size improvement
- Patent number 10,155,656
- Issue date Dec 18, 2018
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Shyh-Wei Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Heater design for MEMS chamber pressure control
- Patent number 10,131,536
- Issue date Nov 20, 2018
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Shyh-Wei Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Metal-oxide-semiconductor field-effect transistor with extended gat...
- Patent number 9,997,601
- Issue date Jun 12, 2018
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shiuan-Jeng Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Metal-insulator-metal (MIM) capacitor with an electrode scheme for...
- Patent number 9,966,427
- Issue date May 8, 2018
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Shyh-Wei Cheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Selective nitride outgassing process for MEMS cavity pressure control
- Patent number 9,884,758
- Issue date Feb 6, 2018
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Shyh-Wei Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of manufacturing a motion sensor device
- Patent number 9,880,192
- Issue date Jan 30, 2018
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shyh-Wei Cheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
One-time-programming (OTP) memory cell with floating gate shielding
- Patent number 9,865,609
- Issue date Jan 9, 2018
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Hung-Lin Chen
- G11 - INFORMATION STORAGE
Information Patent Grant
Method of fabricating MEMS devices having a plurality of cavities
- Patent number 9,561,954
- Issue date Feb 7, 2017
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shyh-Wei Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Movement microelectromechanical systems (MEMS) package
- Patent number 9,527,721
- Issue date Dec 27, 2016
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Shyh-Wei Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Metal-oxide-semiconductor field-effect transistor with extended gat...
- Patent number 9,209,298
- Issue date Dec 8, 2015
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shiuan-Jeng Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mechanism for forming MEMS device
- Patent number 9,090,452
- Issue date Jul 28, 2015
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Shyh-Wei Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Motion sensor device and methods for forming the same
- Patent number 8,960,003
- Issue date Feb 24, 2015
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shyh-Wei Cheng
- G01 - MEASURING TESTING
Information Patent Grant
MEMS devices having a plurality of cavities
- Patent number 8,916,943
- Issue date Dec 23, 2014
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shyh-Wei Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
INTER-POLY CONNECTION FOR PARASITIC CAPACITOR AND DIE SIZE IMPROVEMENT
- Publication number 20220348454
- Publication date Nov 3, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shyh-Wei Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ANTI-STICTION PROCESS FOR MEMS DEVICE
- Publication number 20220242724
- Publication date Aug 4, 2022
- Taiwan Semiconductor Manufacturing Co.,Ltd
- Jui-Chun WENG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR FORMING SEMICONDUCTOR DEVICE STRUCTURE WITH CONDUCTIVE LINE
- Publication number 20200402914
- Publication date Dec 24, 2020
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chi-Cherng JENG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ANTI-STICTION PROCESS FOR MEMS DEVICE
- Publication number 20200123003
- Publication date Apr 23, 2020
- Taiwan Semiconductor Manufacturing Co., LTD
- Jui-Chun Weng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR FORMING SEMICONDUCTOR DEVICE STRUCTURE WITH CONDUCTIVE LINE
- Publication number 20200118932
- Publication date Apr 16, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chi-Cherng JENG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR FORMING SEMICONDUCTOR DEVICE STRUCTURE WITH CONDUCTIVE LINE
- Publication number 20190139895
- Publication date May 9, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chi-Cherng JENG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ANTI-STICTION PROCESS FOR MEMS DEVICE
- Publication number 20190031503
- Publication date Jan 31, 2019
- Taiwan Semiconductor Manufacturing Co., LTD
- Jui-Chun WENG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
HEATER DESIGN FOR MEMS CHAMBER PRESSURE CONTROL
- Publication number 20190010047
- Publication date Jan 10, 2019
- Taiwan Semiconductor Manufacturing Co., LTD
- Shyh-Wei Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
INTER-POLY CONNECTION FOR PARASITIC CAPACITOR AND DIE SIZE IMPROVEMENT
- Publication number 20180370790
- Publication date Dec 27, 2018
- Taiwan Semiconductor Manufacturing Co., LTD
- Shyh-Wei Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METAL-INSULATOR-METAL (MIM) CAPACITOR WITH AN ELECTRODE SCHEME FOR...
- Publication number 20170330931
- Publication date Nov 16, 2017
- Taiwan Semiconductor Manufacturing Co., LTD
- Shyh-Wei Cheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ONE-TIME-PROGRAMMING (OTP) MEMORY CELL WITH FLOATING GATE SHIELDING
- Publication number 20170221910
- Publication date Aug 3, 2017
- Taiwan Semiconductor Manufacturing Co., LTD
- Hung-Lin Chen
- G11 - INFORMATION STORAGE
Information Patent Application
SELECTIVE NITRIDE OUTGASSING PROCESS FOR MEMS CAVITY PRESSURE CONTROL
- Publication number 20170203962
- Publication date Jul 20, 2017
- Taiwan Semiconductor Manufacturing Co., LTD
- Shyh-Wei Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
HEATER DESIGN FOR MEMS CHAMBER PRESSURE CONTROL
- Publication number 20170107100
- Publication date Apr 20, 2017
- Taiwan Semiconductor Manufacturing Co., LTD
- Shyh-Wei Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
INTER-POLY CONNECTION FOR PARASITIC CAPACITOR AND DIE SIZE IMPROVEMENT
- Publication number 20170107097
- Publication date Apr 20, 2017
- Taiwan Semiconductor Manufacturing Co., LTD
- Shyh-Wei Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Movement Microelectromechanical Systems (MEMS) Package
- Publication number 20160332863
- Publication date Nov 17, 2016
- Taiwan Semiconductor Manufacturing Co., LTD
- Shyh-Wei Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Metal-Oxide-Semiconductor Field-Effect Transistor with Extended Gat...
- Publication number 20160079368
- Publication date Mar 17, 2016
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shiuan-Jeng Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Motion Sensor Device and Methods for Forming the Same
- Publication number 20150177273
- Publication date Jun 25, 2015
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shyh-Wei Cheng
- G01 - MEASURING TESTING
Information Patent Application
MECHANISM FOR FORMING MEMS DEVICE
- Publication number 20150158716
- Publication date Jun 11, 2015
- Taiwan Semiconductor Manufacturing Co., LTD
- Shyh-Wei CHENG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF FABRICATING MEMS DEVICES HAVING A PLURALITY OF CAVITIES
- Publication number 20150104895
- Publication date Apr 16, 2015
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shyh-Wei Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Metal-Oxide-Semiconductor Field-Effect Transistor with Extended Gat...
- Publication number 20140252499
- Publication date Sep 11, 2014
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shiuan-Jeng Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MEMS Structures and Methods of Forming the Same
- Publication number 20140246708
- Publication date Sep 4, 2014
- Shyh-Wei Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Motion Sensor Device and Methods for Forming the Same
- Publication number 20130068023
- Publication date Mar 21, 2013
- Taiwan Semiconductor Manufaturing Company, Ltd.
- Shyh-Wei Cheng
- G01 - MEASURING TESTING
Information Patent Application
Reducing Device Mismatch by Adjusting Titanium Formation
- Publication number 20110084391
- Publication date Apr 14, 2011
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shyh-Wei Cheng
- H01 - BASIC ELECTRIC ELEMENTS

Shyh-Wei Cheng

Person

Patents Grantslast 30 patents

Anti-stiction process for MEMS device

Inter-poly connection for parasitic capacitor and die size improvement

Anti-stiction process for MEMS device

Method for forming semiconductor device structure with conductive line

Method for forming semiconductor device structure with conductive line

Heater design for MEMS chamber pressure control

Anti-stiction process for MEMS device

Method for forming semiconductor device structure with conductive line

Inter-poly connection for parasitic capacitor and die size improvement

Heater design for MEMS chamber pressure control

Metal-oxide-semiconductor field-effect transistor with extended gat...

Metal-insulator-metal (MIM) capacitor with an electrode scheme for...

Selective nitride outgassing process for MEMS cavity pressure control

Method of manufacturing a motion sensor device

One-time-programming (OTP) memory cell with floating gate shielding

Method of fabricating MEMS devices having a plurality of cavities

Movement microelectromechanical systems (MEMS) package

Metal-oxide-semiconductor field-effect transistor with extended gat...

Mechanism for forming MEMS device

Motion sensor device and methods for forming the same

MEMS devices having a plurality of cavities

Patents Applicationslast 30 patents

INTER-POLY CONNECTION FOR PARASITIC CAPACITOR AND DIE SIZE IMPROVEMENT

ANTI-STICTION PROCESS FOR MEMS DEVICE

METHOD FOR FORMING SEMICONDUCTOR DEVICE STRUCTURE WITH CONDUCTIVE LINE

ANTI-STICTION PROCESS FOR MEMS DEVICE

METHOD FOR FORMING SEMICONDUCTOR DEVICE STRUCTURE WITH CONDUCTIVE LINE

METHOD FOR FORMING SEMICONDUCTOR DEVICE STRUCTURE WITH CONDUCTIVE LINE

ANTI-STICTION PROCESS FOR MEMS DEVICE

HEATER DESIGN FOR MEMS CHAMBER PRESSURE CONTROL

INTER-POLY CONNECTION FOR PARASITIC CAPACITOR AND DIE SIZE IMPROVEMENT

METAL-INSULATOR-METAL (MIM) CAPACITOR WITH AN ELECTRODE SCHEME FOR...

ONE-TIME-PROGRAMMING (OTP) MEMORY CELL WITH FLOATING GATE SHIELDING

SELECTIVE NITRIDE OUTGASSING PROCESS FOR MEMS CAVITY PRESSURE CONTROL

HEATER DESIGN FOR MEMS CHAMBER PRESSURE CONTROL

INTER-POLY CONNECTION FOR PARASITIC CAPACITOR AND DIE SIZE IMPROVEMENT

Movement Microelectromechanical Systems (MEMS) Package

Metal-Oxide-Semiconductor Field-Effect Transistor with Extended Gat...

Motion Sensor Device and Methods for Forming the Same

MECHANISM FOR FORMING MEMS DEVICE

METHOD OF FABRICATING MEMS DEVICES HAVING A PLURALITY OF CAVITIES

Metal-Oxide-Semiconductor Field-Effect Transistor with Extended Gat...

MEMS Structures and Methods of Forming the Same

Motion Sensor Device and Methods for Forming the Same

Reducing Device Mismatch by Adjusting Titanium Formation