Shyue-Sheng Lu

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Hsin-Chu, TW

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Patents Grantslast 30 patents

Information Patent Grant
Dual damascene process
- Patent number 7,253,112
- Issue date Aug 7, 2007
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Bang-Chien Ho
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for measuring photoresist dimensions
- Patent number 6,866,988
- Issue date Mar 15, 2005
- Taiwan Semiconductor Manufacturing Co., Ltd
- Shyue-Sheng Lu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Dual damascene process
- Publication number 20050014362
- Publication date Jan 20, 2005
- Bang-Chien Ho
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods for measuring photoresist dimensions
- Publication number 20040067448
- Publication date Apr 8, 2004
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Shyue-Sheng Lu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method for reducing light reflectance in a photolithographic process
- Publication number 20030044726
- Publication date Mar 6, 2003
- Taiwan Semiconductor Manufacturing Co., Ltd.,
- Jong Chen
- H01 - BASIC ELECTRIC ELEMENTS