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Shyue-Shin TSAI
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Tainan City, TW
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Patents Grants
last 30 patents
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Patent Grant
Shower head structure and plasma processing apparatus using the same
Patent number
11,859,284
Issue date
Jan 2, 2024
Taiwan Semiconductor Manufacturing Company Ltd.
Huan-Chieh Chen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for sealing processing module
Patent number
9,970,105
Issue date
May 15, 2018
Taiwan Semiconductor Manufacturing Co., Ltd.
Chun-Ta Chen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
SHOWER HEAD STRUCTURE AND PLASMA PROCESSING APPARATUS USING THE SAME
Publication number
20240084450
Publication date
Mar 14, 2024
Taiwan Semiconductor Manufacturing company Ltd.
HUAN-CHIEH CHEN
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SHOWER HEAD STRUCTURE AND PLASMA PROCESSING APPARATUS USING THE SAME
Publication number
20210054506
Publication date
Feb 25, 2021
Taiwan Semiconductor Manufacturing company Ltd.
HUAN-CHIEH CHEN
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD FOR SEALING PROCESSING MODULE
Publication number
20150179456
Publication date
Jun 25, 2015
Taiwan Semiconductor Manufacturing Co., LTD
Chun-Ta CHEN
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...