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Shyuhei Shinozuka
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Atsugi, JP
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last 30 patents
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Patent Grant
Apparatus and nozzle device for gaseous polishing
Patent number
6,447,632
Issue date
Sep 10, 2002
Ebara Corporation
Shyuhei Shinozuka
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Gas polishing apparatus and method
Patent number
6,315,858
Issue date
Nov 13, 2001
Ebara Corporation
Shyuhei Shinozuka
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...