Si-Han ZENG

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New Taipei City, TW

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Patents Grantslast 30 patents

Information Patent Grant
Method of measuring a property of a substrate, inspection apparatus...
- Patent number 10,474,043
- Issue date Nov 12, 2019
- ASML Netherlands B.V.
- Patrick Warnaar
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Metrology method and apparatus, computer program and lithographic s...
- Patent number 10,261,427
- Issue date Apr 16, 2019
- ASML Netherlands B.V.
- Si-Han Zeng
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Metrology method and apparatus, computer program and lithographic s...
- Patent number 9,869,940
- Issue date Jan 16, 2018
- ASML Netherlands B.V.
- Si-Han Zeng
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Method of Measuring a Property of a Substrate, Inspection Apparatus...
- Publication number 20180173105
- Publication date Jun 21, 2018
- ASML NETHERLANDS B.V.
- Patrick Warnaar
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METROLOGY METHOD AND APPARATUS, COMPUTER PROGRAM AND LITHOGRAPHIC S...
- Publication number 20180136570
- Publication date May 17, 2018
- ASML NETHERLANDS B.V.
- Si-Han ZENG
- G01 - MEASURING TESTING
Information Patent Application
Metrology Method and Apparatus, Computer Program and Lithographic S...
- Publication number 20160313654
- Publication date Oct 27, 2016
- ASML NETHERLANDS B.V.
- Si-Han ZENG
- G01 - MEASURING TESTING