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Si-Han ZENG
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Eindhoven, NL
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Patents Grants
last 30 patents
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Patent Grant
Method for determining root causes of events of a semiconductor man...
Patent number
11,796,978
Issue date
Oct 24, 2023
ASML Netherlands B.V.
Chang-Wei Chen
G05 - CONTROLLING REGULATING
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Patent Grant
Method and system for determining overlay
Patent number
11,774,869
Issue date
Oct 3, 2023
ASML Netherlands B.V.
Ruud Hendrikus Martinus Johannes Bloks
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
SETUP AND CONTROL METHODS FOR A LITHOGRAPHIC PROCESS AND ASSOCIATED...
Publication number
20250237965
Publication date
Jul 24, 2025
ASML NETHERLANDS B.V.
Marc HAUPTMANN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
A METHOD AND SYSTEM FOR DETERMINING OVERLAY
Publication number
20220171299
Publication date
Jun 2, 2022
ASML NETHERLANDS B.V.
Ruud Hendrikus Martinus Johannes BLOKS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD FOR DETERMINING ROOT CAUSES OF EVENTS OF A SEMICONDUCTOR MAN...
Publication number
20210397152
Publication date
Dec 23, 2021
ASML NETHERLANDS B.V.
Chang-Wei CHEN
G05 - CONTROLLING REGULATING