Sia Kim Tan

Person

Singapore, SG

People

Patents Grantslast 30 patents

Information Patent Grant
Electrostatic discharge shoe and surface evaluation
- Patent number 11,457,691
- Issue date Oct 4, 2022
- International Business Machines Corporation
- Ho-Yiu Lam
- A43 - FOOTWEAR
Information Patent Grant
System for fastening multiple stacked planar objects with adaptive...
- Patent number 11,445,614
- Issue date Sep 13, 2022
- JLK Technology Pte Ltd
- Sia Nguan Eugene Tan
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Prediction model enhancement
- Patent number 11,257,001
- Issue date Feb 22, 2022
- International Business Machines Corporation
- Lu Liu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Automated static control
- Patent number 11,184,972
- Issue date Nov 23, 2021
- International Business Machines Corporation
- Icko E. T. Iben
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic discharge shoe and surface evaluation
- Patent number 10,945,487
- Issue date Mar 16, 2021
- International Business Machines Corporation
- Ho-Yiu Lam
- E04 - BUILDING
Information Patent Grant
Automated trend detection by self-learning models through image gen...
- Patent number 10,832,393
- Issue date Nov 10, 2020
- International Business Machines Corporation
- Steven Hurley
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Automated static control
- Patent number 10,548,206
- Issue date Jan 28, 2020
- International Business Machines Corporation
- Icko E. T. Iben
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pellicles and devices comprising a photomask and the pellicle
- Patent number 9,395,621
- Issue date Jul 19, 2016
- GLOBALFOUNDRIES Singapore Pte. Ltd.
- Gek Soon Chua
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Liquid immersion scanning exposure system using an immersion liquid...
- Patent number 8,896,810
- Issue date Nov 25, 2014
- GLOBALFOUNDRIES Singapore Pte. Ltd.
- Wenzhan Zhou
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Mask system employing substantially circular optical proximity corr...
- Patent number 8,413,083
- Issue date Apr 2, 2013
- GLOBALFOUNDRIES Singapore Pte. Ltd.
- Sia Kim Tan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Mask and method to pattern chromeless phase lithography contact hole
- Patent number 8,057,968
- Issue date Nov 15, 2011
- GLOBALFOUNDRIES Singapore Pte. Ltd.
- Sia Kim Tan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for removing radiation side lobes
- Patent number 8,048,588
- Issue date Nov 1, 2011
- GLOBALFOUNDRIES Singapore Pte. Ltd.
- Sia Kim Tan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Angled-wedge chrome-face wall for intensity balance of alternating...
- Patent number 8,034,543
- Issue date Oct 11, 2011
- GLOBAL FOUNDRIES Singapore Pte. Ltd.
- Gek Soon Chua
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Integrated circuit system employing multiple exposure dummy pattern...
- Patent number 8,003,311
- Issue date Aug 23, 2011
- GLOBALFOUNDRIES Singapore Pte. Ltd.
- Sia Kim Tan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Cross technology reticles
- Patent number 7,923,180
- Issue date Apr 12, 2011
- Chartered Semiconductor Manufacturing, Ltd.
- Sia Kim Tan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Integrated circuit system employing dipole multiple exposure
- Patent number 7,926,000
- Issue date Apr 12, 2011
- Chartered Semiconductor Manufacturing Ltd.
- Sia Kim Tan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Reticle system for manufacturing integrated circuit systems
- Patent number 7,867,698
- Issue date Jan 11, 2011
- Chartered Semiconductor Manufacturing Ltd.
- Gek Soon Chua
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Monitoring structure
- Patent number 7,866,224
- Issue date Jan 11, 2011
- Chartered Semiconductor Manufacturing Ltd.
- Sia Kim Tan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Integrated circuit system with assist feature
- Patent number 7,836,420
- Issue date Nov 16, 2010
- Chartered Semiconductor Manufacturing Ltd.
- Sia Kim Tan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Angled-wedge chrome-face wall for intensity balance of alternating...
- Patent number 7,674,562
- Issue date Mar 9, 2010
- Chartered Semiconductor Manufacturing, Ltd.
- Gek Soon Chua
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Mask and method to pattern chromeless phase lithography contact hole
- Patent number 7,655,388
- Issue date Feb 2, 2010
- Chartered Semiconductor Manufacturing, Ltd.
- Sia Kim Tan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Phase shifting photolithography system
- Patent number 7,649,612
- Issue date Jan 19, 2010
- Chartered Semiconductor Manufacturing Ltd.
- Qunying Lin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Polarizing photolithography system
- Patent number 7,560,199
- Issue date Jul 14, 2009
- Chartered Semiconductor Manufacturing Ltd.
- Sia Kim Tan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for contact hole unit cell formation
- Patent number 7,556,891
- Issue date Jul 7, 2009
- Chartered Semiconductor Manufacturing Ltd.
- Soon Yoeng Tan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method to resolve line end distortion for alternating phase shift mask
- Patent number 7,445,874
- Issue date Nov 4, 2008
- Chartered Semiconductor Manufacturing, Ltd.
- Sia Kim Tan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System and method for phase shift assignment
- Patent number 7,421,676
- Issue date Sep 2, 2008
- Chartered Semiconductor Manufacturing Ltd.
- Sia Kim Tan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Anti-reflective sidewall coated alternating phase shift mask and fa...
- Patent number 7,384,714
- Issue date Jun 10, 2008
- Chartered Semiconductor Manufacturing Ltd.
- Sia Kim Tan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for dual damascene patterning with single exposure using tri...
- Patent number 7,288,366
- Issue date Oct 30, 2007
- Chartered Semiconductor Manufacturing Ltd.
- Sia Kim Tan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Half tone alternating phase shift masks
- Patent number 7,014,962
- Issue date Mar 21, 2006
- Chartered Semiconductor Manufacturing, Ltd.
- Qun Ying Lin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
HIGH THROUGHPUT SYSTEM FOR PRECISION COMPOSITE PANEL PROCESSING
- Publication number 20240198457
- Publication date Jun 20, 2024
- JLK Technology Pte Ltd
- Sia Nguan Eugene TAN
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
ELECTROSTATIC DISCHARGE SHOE AND SURFACE EVALUATION
- Publication number 20210112913
- Publication date Apr 22, 2021
- International Business Machines Corporation
- Ho-Yiu Lam
- A43 - FOOTWEAR
Information Patent Application
SYSTEM AND METHOD FOR FASTENING MULTIPLE STACKED PLANAR OBJECTS WIT...
- Publication number 20200344887
- Publication date Oct 29, 2020
- JLK Technology Pte Ltd
- Sia Nguan Eugene TAN
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
AUTOMATED TREND DETECTION BY SELF-LEARNING MODELS THROUGH IMAGE GEN...
- Publication number 20200311900
- Publication date Oct 1, 2020
- International Business Machines Corporation
- Steven Hurley
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
PREDICTION MODEL ENHANCEMENT
- Publication number 20200111015
- Publication date Apr 9, 2020
- International Business Machines Corporation
- Lu Liu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
ELECTROSTATIC DISCHARGE SHOE AND SURFACE EVALUATION
- Publication number 20200046065
- Publication date Feb 13, 2020
- International Business Machines Corporation
- Ho-Yiu Lam
- A43 - FOOTWEAR
Information Patent Application
AUTOMATED STATIC CONTROL
- Publication number 20200037424
- Publication date Jan 30, 2020
- International Business Machines Corporation
- Icko E.T. Iben
- G01 - MEASURING TESTING
Information Patent Application
AUTOMATED STATIC CONTROL
- Publication number 20190075640
- Publication date Mar 7, 2019
- International Business Machines Corporation
- Icko E.T. Iben
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
PELLICLES AND DEVICES COMPRISING A PHOTOMASK AND THE PELLICLE
- Publication number 20160139502
- Publication date May 19, 2016
- GLOBALFOUNDRIES SINGAPORE PTE. LTD.
- Gek Soon Chua
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LIQUID IMMERSION SCANNING EXPOSURE SYSTEM USING AN IMMERSION LIQUID...
- Publication number 20110157567
- Publication date Jun 30, 2011
- CHARTERED SEMICONDUCTOR MANUFACTURING, LTD.
- Wenzhan Zhou
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MASK SYSTEM EMPLOYING SUBSTANTIALLY CIRCULAR OPTICAL PROXIMITY CORR...
- Publication number 20100293516
- Publication date Nov 18, 2010
- Chartered Semiconductor Manufacturing LTD.
- Sia Kim Tan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ANGLED-WEDGE CHROME-FACE WALL FOR INTENSITY BALANCE OF ALTERNATING...
- Publication number 20100197140
- Publication date Aug 5, 2010
- CHARTERED SEMICONDUCTOR MANUFACTURING, LTD.
- Gek Soon CHUA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MASK AND METHOD TO PATTERN CHROMELESS PHASE LITHOGRAPHY CONTACT HOLE
- Publication number 20100196805
- Publication date Aug 5, 2010
- CHARTERED SEMICONDUCTOR MANUFACTURING, LTD.
- Sia Kim TAN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CROSS TECHNOLOGY RETICLES
- Publication number 20090286167
- Publication date Nov 19, 2009
- CHARTERED SEMICONDUCTOR MANUFACTURING, LTD.
- Sia Kim Tan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
RETICLE SYSTEM FOR MANUFACTURING INTEGRATED CIRCUIT SYSTEMS
- Publication number 20090284721
- Publication date Nov 19, 2009
- Chartered Semiconductor Manufacturing LTD.
- Gek Soon Chua
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
INTEGRATED CIRCUIT SYSTEM EMPLOYING MULTIPLE EXPOSURE DUMMY PATTERN...
- Publication number 20090181551
- Publication date Jul 16, 2009
- Chartered Semiconductor Manufacturing LTD.
- Sia Kim Tan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
INTEGRATED CIRCUIT SYSTEM WITH ASSIST FEATURE
- Publication number 20090102069
- Publication date Apr 23, 2009
- Chartered Semiconductor Manufacturing LTD.
- Sia Kim Tan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
INTEGRATED CIRCUIT SYSTEM EMPLOYING DIPOLE MULTIPLE EXPOSURE
- Publication number 20080217726
- Publication date Sep 11, 2008
- Chartered Semiconductor Manufacturing LTD.
- Sia Kim Tan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MONITORING STRUCTURE
- Publication number 20080127998
- Publication date Jun 5, 2008
- Chartered Semiconductor Manufacturing LTD.
- Sia Kim Tan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PHASE SHIFTING PHOTOLITHOGRAPHY SYSTEM
- Publication number 20070177121
- Publication date Aug 2, 2007
- Chartered Semiconductor Manufacturing LTD.
- Qunying Lin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Angled-wedge chrome-face wall for intensity balance of alternating...
- Publication number 20070128527
- Publication date Jun 7, 2007
- CHARTERED SEMICONDUCTOR MANUFACTURING, LTD.
- Gek Soon Chua
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
POLARIZING PHOTOLITHOGRAPHY SYSTEM
- Publication number 20070092839
- Publication date Apr 26, 2007
- Chartered Semiconductor Manufacturing LTD.
- Sia Kim Tan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Structure and method to fabricate a protective sidewall liner for a...
- Publication number 20060105520
- Publication date May 18, 2006
- Sia Kim Tan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method to resolve line end distortion for alternating phase shift mask
- Publication number 20060099518
- Publication date May 11, 2006
- Sia Kim Tan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Anti-reflective sidewall coated alternating phase shift mask and fa...
- Publication number 20060088771
- Publication date Apr 27, 2006
- CHARTERED SEMICONDUCTOR MANUFACTURING, LTD.
- Sia Kim Tan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and apparatus for contact hole unit cell formation
- Publication number 20060088770
- Publication date Apr 27, 2006
- Chartered Semiconductor Manufacturing LTD.
- Soon Yoeng Tan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and apparatus for removing radiation side lobes
- Publication number 20060083994
- Publication date Apr 20, 2006
- Chartered Semiconductor manufacturing , Ltd.
- Sia Kim Tan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
System and method for phase shift assignment
- Publication number 20060075376
- Publication date Apr 6, 2006
- CHARTERED SEMICONDUCTOR MANUFACTURING, LTD.
- Sia Kim Tan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method for dual damascene patterning with single exposure using tri...
- Publication number 20050089763
- Publication date Apr 28, 2005
- Sia Kim Tan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Half tone alternating phase shift masks
- Publication number 20050058912
- Publication date Mar 17, 2005
- Qun Ying Lin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Sia Kim Tan

Person

Patents Grantslast 30 patents

Electrostatic discharge shoe and surface evaluation

System for fastening multiple stacked planar objects with adaptive...

Prediction model enhancement

Automated static control

Electrostatic discharge shoe and surface evaluation

Automated trend detection by self-learning models through image gen...

Automated static control

Pellicles and devices comprising a photomask and the pellicle

Liquid immersion scanning exposure system using an immersion liquid...

Mask system employing substantially circular optical proximity corr...

Mask and method to pattern chromeless phase lithography contact hole

Method and apparatus for removing radiation side lobes

Angled-wedge chrome-face wall for intensity balance of alternating...

Integrated circuit system employing multiple exposure dummy pattern...

Cross technology reticles

Integrated circuit system employing dipole multiple exposure

Reticle system for manufacturing integrated circuit systems

Monitoring structure

Integrated circuit system with assist feature

Angled-wedge chrome-face wall for intensity balance of alternating...

Mask and method to pattern chromeless phase lithography contact hole

Phase shifting photolithography system

Polarizing photolithography system

Method and apparatus for contact hole unit cell formation

Method to resolve line end distortion for alternating phase shift mask

System and method for phase shift assignment

Anti-reflective sidewall coated alternating phase shift mask and fa...

Method for dual damascene patterning with single exposure using tri...

Half tone alternating phase shift masks

Patents Applicationslast 30 patents

HIGH THROUGHPUT SYSTEM FOR PRECISION COMPOSITE PANEL PROCESSING

ELECTROSTATIC DISCHARGE SHOE AND SURFACE EVALUATION

SYSTEM AND METHOD FOR FASTENING MULTIPLE STACKED PLANAR OBJECTS WIT...

AUTOMATED TREND DETECTION BY SELF-LEARNING MODELS THROUGH IMAGE GEN...

PREDICTION MODEL ENHANCEMENT

ELECTROSTATIC DISCHARGE SHOE AND SURFACE EVALUATION

AUTOMATED STATIC CONTROL

AUTOMATED STATIC CONTROL

PELLICLES AND DEVICES COMPRISING A PHOTOMASK AND THE PELLICLE

LIQUID IMMERSION SCANNING EXPOSURE SYSTEM USING AN IMMERSION LIQUID...

MASK SYSTEM EMPLOYING SUBSTANTIALLY CIRCULAR OPTICAL PROXIMITY CORR...

ANGLED-WEDGE CHROME-FACE WALL FOR INTENSITY BALANCE OF ALTERNATING...

MASK AND METHOD TO PATTERN CHROMELESS PHASE LITHOGRAPHY CONTACT HOLE

CROSS TECHNOLOGY RETICLES

RETICLE SYSTEM FOR MANUFACTURING INTEGRATED CIRCUIT SYSTEMS

INTEGRATED CIRCUIT SYSTEM EMPLOYING MULTIPLE EXPOSURE DUMMY PATTERN...

INTEGRATED CIRCUIT SYSTEM WITH ASSIST FEATURE

INTEGRATED CIRCUIT SYSTEM EMPLOYING DIPOLE MULTIPLE EXPOSURE

MONITORING STRUCTURE

PHASE SHIFTING PHOTOLITHOGRAPHY SYSTEM

Angled-wedge chrome-face wall for intensity balance of alternating...

POLARIZING PHOTOLITHOGRAPHY SYSTEM

Structure and method to fabricate a protective sidewall liner for a...

Method to resolve line end distortion for alternating phase shift mask

Anti-reflective sidewall coated alternating phase shift mask and fa...

Method and apparatus for contact hole unit cell formation

Method and apparatus for removing radiation side lobes

System and method for phase shift assignment

Method for dual damascene patterning with single exposure using tri...

Half tone alternating phase shift masks