Siddharth P. Nagarkatti

Person

Acton, MA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Systems, methods and apparatus for choked flow element extraction
- Patent number 10,424,460
- Issue date Sep 24, 2019
- Lam Research Corporation
- Ali Shajii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Distributed multi-zone plasma source systems, methods and apparatus
- Patent number 10,283,325
- Issue date May 7, 2019
- Lam Research Corporation
- Ali Shajii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Distributed, concentric multi-zone plasma source systems, methods a...
- Patent number 9,967,965
- Issue date May 8, 2018
- Lam Research Corporation
- Ali Shajii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems, methods and apparatus for choked flow element extraction
- Patent number 9,449,793
- Issue date Sep 20, 2016
- Lam Research Corporation
- Ali Shajii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Distributed multi-zone plasma source systems, methods and apparatus
- Patent number 9,155,181
- Issue date Oct 6, 2015
- Lam Research Corporation
- Ali Shajii
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Systems, methods and apparatus for separate plasma source control
- Patent number 8,999,104
- Issue date Apr 7, 2015
- Lam Research Corporation
- Ali Shajii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Radio frequency power delivery system
- Patent number 8,710,926
- Issue date Apr 29, 2014
- MKS Instruments, Inc.
- Siddharth P. Nagarkatti
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Pressure regulation in remote zones
- Patent number 8,689,822
- Issue date Apr 8, 2014
- MKS Instruments, Inc.
- Ali Shajii
- G05 - CONTROLLING REGULATING
Information Patent Grant
Method and apparatus of providing power to ignite and sustain a pla...
- Patent number 8,692,466
- Issue date Apr 8, 2014
- MKS Instruments Inc.
- Souheil Benzerrouk
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for controlling radio frequency power
- Patent number 8,659,335
- Issue date Feb 25, 2014
- MKS Instruments, Inc.
- Siddharth Nagarkatti
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Radio frequency power delivery system
- Patent number 8,633,782
- Issue date Jan 21, 2014
- MKS Instruments, Inc.
- Siddharth P. Nagarkatti
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Measuring and controlling parameters of a plasma generator
- Patent number 8,624,501
- Issue date Jan 7, 2014
- MKS Instruments, Inc.
- Siddharth P. Nagarkatti
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pressure regulation in remote zones
- Patent number 8,037,896
- Issue date Oct 18, 2011
- MKS Instruments, Inc.
- Ali Shajii
- G05 - CONTROLLING REGULATING
Information Patent Grant
Pulsed mass flow delivery system and method
- Patent number 7,829,353
- Issue date Nov 9, 2010
- MKS Instruments, Inc.
- Ali Shajii
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Radio frequency power delivery system
- Patent number 7,764,140
- Issue date Jul 27, 2010
- MKS Instruments, Inc.
- Siddharth P. Nagarkatti
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Pulsed mass flow delivery system and method
- Patent number 7,628,860
- Issue date Dec 8, 2009
- MKS Instruments, Inc.
- Ali Shajii
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pulsed mass flow delivery system and method
- Patent number 7,615,120
- Issue date Nov 10, 2009
- MKS Instruments, Inc.
- Ali Shajii
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Synchronous undersampling for high-frequency voltage and current me...
- Patent number 7,477,711
- Issue date Jan 13, 2009
- MKS Instruments, Inc.
- Tim Kalvaitis
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Flow monitoring system
- Patent number 7,120,542
- Issue date Oct 10, 2006
- MKS Instruments, Inc.
- Nicholas Kottenstette
- G01 - MEASURING TESTING
Information Patent Grant
Semiconductor manufacturing gas flow divider system and method
- Patent number 7,072,743
- Issue date Jul 4, 2006
- MKS Instruments, Inc.
- Ali Shajii
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System and method for controlling pressure in remote zones
- Patent number 6,986,359
- Issue date Jan 17, 2006
- MKS Instruments, Inc.
- Ali Shajii
- G05 - CONTROLLING REGULATING
Information Patent Grant
Two phase flow sensor using tomography techniques
- Patent number 6,857,323
- Issue date Feb 22, 2005
- MKS Instruments, Inc.
- Ali Shajii
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Distributed, Non-Concentric Multi-Zone Plasma Source Systems, Metho...
- Publication number 20180228015
- Publication date Aug 9, 2018
- LAM RESEARCH CORPORATION
- Ali Shajii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Systems, Methods and Apparatus for Choked Flow Element Extraction
- Publication number 20160358754
- Publication date Dec 8, 2016
- LAM RESEARCH CORPORATION
- Ali Shajii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DISTRIBUTED MULTI-ZONE PLASMA SOURCE SYSTEMS, METHODS AND APPARATUS
- Publication number 20140096908
- Publication date Apr 10, 2014
- LAM RESEARCH CORPORATION
- Ali Shajii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Distributed, Non-Concentric Multi-Zone Plasma Source Systems, Metho...
- Publication number 20130025788
- Publication date Jan 31, 2013
- Ali Shajii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Radio Frequency Power Delivery System
- Publication number 20120262064
- Publication date Oct 18, 2012
- MKS Instruments, Inc.
- Siddharth P. Nagarkatti
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
PRESSURE REGULATION IN REMOTE ZONES
- Publication number 20120202408
- Publication date Aug 9, 2012
- MKS Instruments, Inc.
- Ali Shajii
- G05 - CONTROLLING REGULATING
Information Patent Application
MEASURING AND CONTROLLING PARAMETERS OF A PLASMA GENERATOR
- Publication number 20120146508
- Publication date Jun 14, 2012
- MKS Instruments, Inc.
- Siddharth P. Nagarkatti
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS, METHODS AND APPARATUS FOR CHOKED FLOW ELEMENT EXTRACTION
- Publication number 20120035766
- Publication date Feb 9, 2012
- Ali Shajii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DISTRIBUTED MULTI-ZONE PLASMA SOURCE SYSTEMS, METHODS AND APPARATUS
- Publication number 20120034394
- Publication date Feb 9, 2012
- Ali Shajii
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
SYSTEMS, METHODS AND APPARATUS FOR SEPARATE PLASMA SOURCE CONTROL
- Publication number 20120031876
- Publication date Feb 9, 2012
- Ali Shajii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND SYSTEM FOR CONTROLLING RADIO FREQUENCY POWER
- Publication number 20100327927
- Publication date Dec 30, 2010
- MKS Instruments, Inc.
- Siddharth Nagarkatti
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
Radio Frequency Power Delivery System
- Publication number 20100231296
- Publication date Sep 16, 2010
- MKS Instruments, Inc.
- Siddharth P. Nagarkatti
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
Method and Apparatus of Providing Power to Ignite and Sustain a Pla...
- Publication number 20100219757
- Publication date Sep 2, 2010
- Souheil Benzerrouk
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RADIO FREQUENCY POWER DELIVERY SYSTEM
- Publication number 20080179948
- Publication date Jul 31, 2008
- MKS Instruments, Inc.
- Siddharth P. Nagarkatti
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
Radio Frequency Power Delivery System
- Publication number 20070139122
- Publication date Jun 21, 2007
- MKS Instruments, Inc.
- Siddharth P. Nagarkatti
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
Pulsed mass flow delivery system and method
- Publication number 20070039549
- Publication date Feb 22, 2007
- MKS Instruments, Inc.
- Ali Shajii
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Pulsed mass flow delivery system and method
- Publication number 20070039550
- Publication date Feb 22, 2007
- MKS Instruments, Inc.
- Ali Shajii
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Pulsed mass flow delivery system and method
- Publication number 20070042508
- Publication date Feb 22, 2007
- MKS Instruments, Inc.
- Ali Shajii
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Synchronous undersampling for high-frequency voltage and current me...
- Publication number 20060262889
- Publication date Nov 23, 2006
- MKS Instruments, Inc.
- Tim Kalvaitis
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Pressure regulation in remote zones
- Publication number 20060169327
- Publication date Aug 3, 2006
- MKS Instruments, Inc.
- Ali Shajii
- G05 - CONTROLLING REGULATING
Information Patent Application
Pulsed mass flow delivery system and method
- Publication number 20050223979
- Publication date Oct 13, 2005
- Ali Shajii
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Flow measurement calibration
- Publication number 20050217346
- Publication date Oct 6, 2005
- Siddharth P. Nagarkatti
- G01 - MEASURING TESTING
Information Patent Application
Flow monitoring system
- Publication number 20050222782
- Publication date Oct 6, 2005
- Nicholas Kottenstette
- G05 - CONTROLLING REGULATING
Information Patent Application
SYSTEM AND METHOD FOR CONTROLLING PRESSURE IN REMOTE ZONES
- Publication number 20050199287
- Publication date Sep 15, 2005
- Ali Shajii
- G05 - CONTROLLING REGULATING
Information Patent Application
Semiconductor manufacturing gas flow divider system and method
- Publication number 20050199342
- Publication date Sep 15, 2005
- Ali Shajii
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Siddharth P. Nagarkatti

Person

Patents Grantslast 30 patents

Systems, methods and apparatus for choked flow element extraction

Distributed multi-zone plasma source systems, methods and apparatus

Distributed, concentric multi-zone plasma source systems, methods a...

Systems, methods and apparatus for choked flow element extraction

Distributed multi-zone plasma source systems, methods and apparatus

Systems, methods and apparatus for separate plasma source control

Radio frequency power delivery system

Pressure regulation in remote zones

Method and apparatus of providing power to ignite and sustain a pla...

Method and system for controlling radio frequency power

Radio frequency power delivery system

Measuring and controlling parameters of a plasma generator

Pressure regulation in remote zones

Pulsed mass flow delivery system and method

Radio frequency power delivery system

Pulsed mass flow delivery system and method

Pulsed mass flow delivery system and method

Synchronous undersampling for high-frequency voltage and current me...

Flow monitoring system

Semiconductor manufacturing gas flow divider system and method

System and method for controlling pressure in remote zones

Two phase flow sensor using tomography techniques

Patents Applicationslast 30 patents

Distributed, Non-Concentric Multi-Zone Plasma Source Systems, Metho...

Systems, Methods and Apparatus for Choked Flow Element Extraction

DISTRIBUTED MULTI-ZONE PLASMA SOURCE SYSTEMS, METHODS AND APPARATUS

Distributed, Non-Concentric Multi-Zone Plasma Source Systems, Metho...

Radio Frequency Power Delivery System

PRESSURE REGULATION IN REMOTE ZONES

MEASURING AND CONTROLLING PARAMETERS OF A PLASMA GENERATOR

SYSTEMS, METHODS AND APPARATUS FOR CHOKED FLOW ELEMENT EXTRACTION

DISTRIBUTED MULTI-ZONE PLASMA SOURCE SYSTEMS, METHODS AND APPARATUS

SYSTEMS, METHODS AND APPARATUS FOR SEPARATE PLASMA SOURCE CONTROL

METHOD AND SYSTEM FOR CONTROLLING RADIO FREQUENCY POWER

Radio Frequency Power Delivery System

Method and Apparatus of Providing Power to Ignite and Sustain a Pla...

RADIO FREQUENCY POWER DELIVERY SYSTEM

Radio Frequency Power Delivery System

Pulsed mass flow delivery system and method

Pulsed mass flow delivery system and method

Pulsed mass flow delivery system and method

Synchronous undersampling for high-frequency voltage and current me...

Pressure regulation in remote zones

Pulsed mass flow delivery system and method

Flow measurement calibration

Flow monitoring system

SYSTEM AND METHOD FOR CONTROLLING PRESSURE IN REMOTE ZONES

Semiconductor manufacturing gas flow divider system and method