Sidney P. Huey

Person

Fremont, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Training a machine learning system to detect an excursion of a CMP...
- Patent number 12,148,149
- Issue date Nov 19, 2024
- Applied Materials, Inc.
- Sidney P. Huey
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Detecting an excursion of a CMP component using time-based sequence...
- Patent number 12,079,984
- Issue date Sep 3, 2024
- Applied Materials, Inc.
- Sidney P. Huey
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method of forming retaining ring with shaped surface
- Patent number 11,850,703
- Issue date Dec 26, 2023
- Applied Materials, Inc.
- Hung Chih Chen
- B24 - GRINDING POLISHING
Information Patent Grant
Detecting an excursion of a CMP component using time-based sequence...
- Patent number 11,710,228
- Issue date Jul 25, 2023
- Applied Materials, Inc.
- Sidney P. Huey
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Retaining ring with shaped surface and method of forming
- Patent number 11,577,361
- Issue date Feb 14, 2023
- Applied Materials, Inc.
- Hung Chih Chen
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Retaining ring with shaped surface
- Patent number 11,260,500
- Issue date Mar 1, 2022
- Applied Materials, Inc.
- Hung Chih Chen
- B24 - GRINDING POLISHING
Information Patent Grant
Retaining ring with shaped surface
- Patent number 10,766,117
- Issue date Sep 8, 2020
- Applied Materials, Inc.
- Hung Chih Chen
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing with measurement prior to deposition of outer layer
- Patent number 10,651,098
- Issue date May 12, 2020
- Applied Materials, Inc.
- Tomohiko Kitajima
- B24 - GRINDING POLISHING
Information Patent Grant
Retaining ring with Shaped Surface
- Patent number 9,937,601
- Issue date Apr 10, 2018
- Applied Materials, Inc.
- Hung Chih Chen
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing with pre deposition spectrum
- Patent number 9,811,077
- Issue date Nov 7, 2017
- Applied Materials, Inc.
- Tomohiko Kitajima
- G05 - CONTROLLING REGULATING
Information Patent Grant
Polishing with eddy current feed meaurement prior to deposition of...
- Patent number 9,362,186
- Issue date Jun 7, 2016
- Applied Materials, Inc.
- Tomohiko Kitajima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Retaining ring with shaped surface
- Patent number 9,186,773
- Issue date Nov 17, 2015
- Applied Materials, Inc.
- Hung Chih Chen
- B24 - GRINDING POLISHING
Information Patent Grant
Retaining ring with shaped surface
- Patent number 8,585,468
- Issue date Nov 19, 2013
- Applied Materials, Inc.
- Hung Chih Chen
- B24 - GRINDING POLISHING
Information Patent Grant
Post CMP scrubbing of substrates
- Patent number 8,372,210
- Issue date Feb 12, 2013
- Applied Materials, Inc.
- Garrett H. Sin
- B08 - CLEANING
Information Patent Grant
Retaining ring with shaped surface
- Patent number 8,066,551
- Issue date Nov 29, 2011
- Applied Materials, Inc.
- Hung Chih Chen
- B24 - GRINDING POLISHING
Information Patent Grant
High throughput measurement system
- Patent number 7,952,708
- Issue date May 31, 2011
- Applied Materials, Inc.
- Abraham Ravid
- G01 - MEASURING TESTING
Information Patent Grant
Retaining ring with shaped surface
- Patent number 7,927,190
- Issue date Apr 19, 2011
- Applied Materials, Inc.
- Hung Chih Chen
- B24 - GRINDING POLISHING
Information Patent Grant
Methods and apparatus for generating a library of spectra
- Patent number 7,840,375
- Issue date Nov 23, 2010
- Applied Materials, Inc.
- Abraham Ravid
- G01 - MEASURING TESTING
Information Patent Grant
CMP platen with patterned surface
- Patent number 6,592,438
- Issue date Jul 15, 2003
- Applied Materials Inc.
- Robert D. Tolles
- B24 - GRINDING POLISHING
Information Patent Grant
Carrier head for providing a polishing slurry
- Patent number 6,527,624
- Issue date Mar 4, 2003
- Applied Materials, Inc.
- Robert D. Tolles
- B24 - GRINDING POLISHING
Information Patent Grant
Utility wafer for chemical mechanical polishing
- Patent number 6,361,405
- Issue date Mar 26, 2002
- Applied Materials, Inc.
- Jeffrey D. David
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Conditioning fixed abrasive articles
- Patent number 6,322,427
- Issue date Nov 27, 2001
- Applied Materials, Inc.
- Shijian Li
- B24 - GRINDING POLISHING
Information Patent Grant
Cleaning and slurry distribution system assembly for use in chemica...
- Patent number 6,283,840
- Issue date Sep 4, 2001
- Applied Materials, Inc.
- Sidney Huey
- B24 - GRINDING POLISHING
Information Patent Grant
Method of post CMP defect stability improvement
- Patent number 6,220,941
- Issue date Apr 24, 2001
- Applied Materials, Inc.
- Boris Fishkin
- B24 - GRINDING POLISHING
Information Patent Grant
CMP platen with patterned surface
- Patent number 6,220,942
- Issue date Apr 24, 2001
- Applied Materials, Inc.
- Robert D. Tolles
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
DETECTING AN EXCURSION OF A CMP COMPONENT USING TIME-BASED SEQUENCE...
- Publication number 20240378718
- Publication date Nov 14, 2024
- Applied Materials, Inc.
- Sidney P. Huey
- B24 - GRINDING POLISHING
Information Patent Application
PAD SURFACE CLEANING DEVICE AROUND PAD CONDITIONER TO ENABLE INSITU...
- Publication number 20240066664
- Publication date Feb 29, 2024
- Applied Materials, Inc.
- Shou-Sung CHANG
- B08 - CLEANING
Information Patent Application
TRAINING A MACHINE LEARNING SYSTEM TO DETECT AN EXCURSION OF A CMP...
- Publication number 20230316502
- Publication date Oct 5, 2023
- Applied Materials, Inc.
- Sidney P. Huey
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD OF FORMING RETAINING RING WITH SHAPED SURFACE
- Publication number 20230182261
- Publication date Jun 15, 2023
- Applied Materials, Inc.
- Hung Chih Chen
- B24 - GRINDING POLISHING
Information Patent Application
DETECTING AN EXCURSION OF A CMP COMPONENT USING TIME-BASED SEQUENCE...
- Publication number 20220284560
- Publication date Sep 8, 2022
- Applied Materials, Inc.
- Sidney P. Huey
- B24 - GRINDING POLISHING
Information Patent Application
DETECTING AN EXCURSION OF A CMP COMPONENT USING TIME-BASED SEQUENCE...
- Publication number 20220284561
- Publication date Sep 8, 2022
- Applied Materials, Inc.
- Sidney P. Huey
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
ADAPTIVE SLURRY DISPENSE SYSTEM
- Publication number 20220193858
- Publication date Jun 23, 2022
- Applied Materials, Inc.
- Sameer DESHPANDE
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
RETAINING RING WITH SHAPED SURFACE AND METHOD OF FORMING
- Publication number 20220152778
- Publication date May 19, 2022
- Applied Materials, Inc.
- Hung Chih Chen
- B24 - GRINDING POLISHING
Information Patent Application
Retaining Ring with Shaped Surface
- Publication number 20200398399
- Publication date Dec 24, 2020
- Applied Materials, Inc.
- Hung Chih Chen
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Application
Retaining Ring With Shaped Surface
- Publication number 20180185979
- Publication date Jul 5, 2018
- Applied Materials, Inc.
- Hung Chih Chen
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING WITH MEASUREMENT PRIOR TO DEPOSITION OF OUTER LAYER
- Publication number 20160284615
- Publication date Sep 29, 2016
- Applied Materials, Inc.
- Tomohiko Kitajima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Retaining Ring With Shaped Surface
- Publication number 20160045997
- Publication date Feb 18, 2016
- Applied Materials, Inc.
- Hung Chih Chen
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING WITH PRE DEPOSITION SPECTRUM
- Publication number 20160018815
- Publication date Jan 21, 2016
- Applied Materials, Inc.
- Tomohiko Kitajima
- G05 - CONTROLLING REGULATING
Information Patent Application
POLISHING WITH EDDY CURRENT FEED MEAUREMENT PRIOR TO DEPOSITION OF...
- Publication number 20160020157
- Publication date Jan 21, 2016
- Tomohiko Kitajima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CRYOGENIC LIQUID CLEANING APPARATUS AND METHODS
- Publication number 20140196749
- Publication date Jul 17, 2014
- Jianshe Tang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Retaining Ring With Shaped Surface
- Publication number 20140053981
- Publication date Feb 27, 2014
- Applied Materials, Inc.
- Hung Chih Chen
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Application
POST CMP SCRUBBING OF SUBSTRATES
- Publication number 20130139851
- Publication date Jun 6, 2013
- Applied Materials, Inc.
- Garrett H. Sin
- B08 - CLEANING
Information Patent Application
RETAINING RING WITH SHAPED SURFACE
- Publication number 20120071067
- Publication date Mar 22, 2012
- Hung Chih Chen
- B24 - GRINDING POLISHING
Information Patent Application
RETAINING RING WITH SHAPED SURFACE
- Publication number 20110195639
- Publication date Aug 11, 2011
- Hung Chih Chen
- B24 - GRINDING POLISHING
Information Patent Application
METHODS AND APPARATUS FOR GENERATING A LIBRARY OF SPECTRA
- Publication number 20110046918
- Publication date Feb 24, 2011
- Abraham Ravid
- G01 - MEASURING TESTING
Information Patent Application
POST CMP SCRUBBING OF SUBSTRATES
- Publication number 20090031512
- Publication date Feb 5, 2009
- APPLIED MATERIALS, INC.
- Garrett H. Sin
- B08 - CLEANING
Information Patent Application
HIGH THROUGHPUT MEASUREMENT SYSTEM
- Publication number 20080239308
- Publication date Oct 2, 2008
- APPLIED MATERIALS, INC.
- Abraham Ravid
- G01 - MEASURING TESTING
Information Patent Application
METHODS AND APPARATUS FOR GENERATING A LIBRARY OF SPECTRA
- Publication number 20080243433
- Publication date Oct 2, 2008
- Abraham Ravid
- G01 - MEASURING TESTING
Information Patent Application
RETAINING RING WITH SHAPED SURFACE
- Publication number 20080196833
- Publication date Aug 21, 2008
- Applied Materials, Inc.
- Hung Chih Chen
- B24 - GRINDING POLISHING
Information Patent Application
Methods and compositions for chemical mechanical polishing substrates
- Publication number 20060088999
- Publication date Apr 27, 2006
- APPLIED MATERIALS, INC.
- Garrett H. Sin
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
Methods and compositions for chemical mechanical polishing substrates
- Publication number 20060088976
- Publication date Apr 27, 2006
- APPLIED MATERIALS, INC.
- Garrett H. Sin
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
Retaining ring with shaped surface
- Publication number 20050191947
- Publication date Sep 1, 2005
- Hung Chih Chen
- B24 - GRINDING POLISHING
Information Patent Application
Post CMP scrubbing of substrates
- Publication number 20050109371
- Publication date May 26, 2005
- APPLIED MATERIALS, INC.
- Garrett H. Sin
- B08 - CLEANING
Information Patent Application
CMP platen with patterned surface
- Publication number 20040053566
- Publication date Mar 18, 2004
- APPLIED MATERIALS, INC.
- Robert D. Tolles
- B24 - GRINDING POLISHING
Information Patent Application
Apparatus and method for controlled delivery of slurry to a region...
- Publication number 20020068516
- Publication date Jun 6, 2002
- APPLIED MATERIALS, INC.
- Hung Chen
- B24 - GRINDING POLISHING

Sidney P. Huey

Person

Patents Grantslast 30 patents

Training a machine learning system to detect an excursion of a CMP...

Detecting an excursion of a CMP component using time-based sequence...

Method of forming retaining ring with shaped surface

Detecting an excursion of a CMP component using time-based sequence...

Retaining ring with shaped surface and method of forming

Retaining ring with shaped surface

Retaining ring with shaped surface

Polishing with measurement prior to deposition of outer layer

Retaining ring with Shaped Surface

Polishing with pre deposition spectrum

Polishing with eddy current feed meaurement prior to deposition of...

Retaining ring with shaped surface

Retaining ring with shaped surface

Post CMP scrubbing of substrates

Retaining ring with shaped surface

High throughput measurement system

Retaining ring with shaped surface

Methods and apparatus for generating a library of spectra

CMP platen with patterned surface

Carrier head for providing a polishing slurry

Utility wafer for chemical mechanical polishing

Conditioning fixed abrasive articles

Cleaning and slurry distribution system assembly for use in chemica...

Method of post CMP defect stability improvement

CMP platen with patterned surface

Patents Applicationslast 30 patents

DETECTING AN EXCURSION OF A CMP COMPONENT USING TIME-BASED SEQUENCE...

PAD SURFACE CLEANING DEVICE AROUND PAD CONDITIONER TO ENABLE INSITU...

TRAINING A MACHINE LEARNING SYSTEM TO DETECT AN EXCURSION OF A CMP...

METHOD OF FORMING RETAINING RING WITH SHAPED SURFACE

DETECTING AN EXCURSION OF A CMP COMPONENT USING TIME-BASED SEQUENCE...

DETECTING AN EXCURSION OF A CMP COMPONENT USING TIME-BASED SEQUENCE...

ADAPTIVE SLURRY DISPENSE SYSTEM

RETAINING RING WITH SHAPED SURFACE AND METHOD OF FORMING

Retaining Ring with Shaped Surface

Retaining Ring With Shaped Surface

POLISHING WITH MEASUREMENT PRIOR TO DEPOSITION OF OUTER LAYER

Retaining Ring With Shaped Surface

POLISHING WITH PRE DEPOSITION SPECTRUM

POLISHING WITH EDDY CURRENT FEED MEAUREMENT PRIOR TO DEPOSITION OF...

CRYOGENIC LIQUID CLEANING APPARATUS AND METHODS

Retaining Ring With Shaped Surface

POST CMP SCRUBBING OF SUBSTRATES

RETAINING RING WITH SHAPED SURFACE

RETAINING RING WITH SHAPED SURFACE

METHODS AND APPARATUS FOR GENERATING A LIBRARY OF SPECTRA

POST CMP SCRUBBING OF SUBSTRATES

HIGH THROUGHPUT MEASUREMENT SYSTEM

METHODS AND APPARATUS FOR GENERATING A LIBRARY OF SPECTRA

RETAINING RING WITH SHAPED SURFACE

Methods and compositions for chemical mechanical polishing substrates

Methods and compositions for chemical mechanical polishing substrates

Retaining ring with shaped surface

Post CMP scrubbing of substrates

CMP platen with patterned surface

Apparatus and method for controlled delivery of slurry to a region...