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Patents Grants
last 30 patents
Information
Patent Grant
Method and system for determining overlay
Patent number
11,774,869
Issue date
Oct 3, 2023
ASML Netherlands B.V.
Ruud Hendrikus Martinus Johannes Bloks
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and a method of operating the apparatus
Patent number
10,429,741
Issue date
Oct 1, 2019
ASML Netherlands B.V.
Jeroen Peter Johannes Bruijstens
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and a method of operating the apparatus
Patent number
10,151,984
Issue date
Dec 11, 2018
ASML Netherlands B.V.
Jeroen Peter Johannes Bruijstens
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and a method of operating the apparatus
Patent number
10,146,139
Issue date
Dec 4, 2018
ASML Netherlands B.V.
Ivo Adam Johannes Thomas
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
10,088,755
Issue date
Oct 2, 2018
ASML Netherlands B.V.
Marcus Adrianus Van De Kerkhof
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
9,715,179
Issue date
Jul 25, 2017
ASML Netherlands B.V.
Marcus Adrianus Van De Kerkhof
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and a method of operating the apparatus
Patent number
9,709,901
Issue date
Jul 18, 2017
ASML Netherlands B.V.
Ivo Adam Johannes Thomas
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
9,182,678
Issue date
Nov 10, 2015
ASML Netherlands B.V.
Marcus Adrianus Van De Kerkhof
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Immersion lithographic apparatus with a barrier between a projectio...
Patent number
9,176,371
Issue date
Nov 3, 2015
ASML Netherlands B.V.
Jeroen Peter Johannes Bruijstens
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and method of operating the apparatus
Patent number
8,928,857
Issue date
Jan 6, 2015
ASML Netherlands B.V.
Ivo Adam Johannes Thomas
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and method of operating the apparatus with a...
Patent number
8,730,447
Issue date
May 20, 2014
ASML Netherlands B.V.
Jeroen Peter Johannes Bruijstens
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
8,462,314
Issue date
Jun 11, 2013
ASML Netherlands B.V.
Marcel Beckers
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and method
Patent number
8,451,423
Issue date
May 28, 2013
ASML Netherlands B.V.
Franciscus Johannes Joseph Janssen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
8,233,134
Issue date
Jul 31, 2012
ASML Netherlands B.V.
Marcus Adrianus Van De Kerkhof
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
System for flushing at least one internal space of an objective
Patent number
6,825,914
Issue date
Nov 30, 2004
Carl Zeiss SMT AG
Joachim Schroeder
G02 - OPTICS
Patents Applications
last 30 patents
Information
Patent Application
A METHOD AND SYSTEM FOR DETERMINING OVERLAY
Publication number
20220171299
Publication date
Jun 2, 2022
ASML NETHERLANDS B.V.
Ruud Hendrikus Martinus Johannes BLOKS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND A METHOD OF OPERATING THE APPARATUS
Publication number
20190086814
Publication date
Mar 21, 2019
ASML NETHERLANDS B.V.
Jeroen Peter Johannes Bruijstens
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20170285489
Publication date
Oct 5, 2017
ASML NETHERLANDS B.V.
Marcus Adrianus VAN DE KERKHOF
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND A METHOD OF OPERATING THE APPARATUS
Publication number
20170285487
Publication date
Oct 5, 2017
ASML NETHERLANDS B.V.
Ivo Adam Johannes THOMAS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND A METHOD OF OPERATING THE APPARATUS
Publication number
20160124319
Publication date
May 5, 2016
ASML NETHERLANDS B.V.
Jeroen Peter Johannes Bruijstens
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20160054647
Publication date
Feb 25, 2016
ASML NETHERLANDS B.V.
Marcus Adrianus VAN DE KERKHOF
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND A METHOD OF OPERATING THE APPARATUS
Publication number
20150109592
Publication date
Apr 23, 2015
ASML NETHERLANDS B.V.
Ivo Adam Johannes THOMAS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic Apparatus and Device Manufacturing Method
Publication number
20130162964
Publication date
Jun 27, 2013
ASML NETHERLANDS B.V.
Ivo Adam Johannes THOMAS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20120274912
Publication date
Nov 1, 2012
ASML NETHERLANDS B.V.
Marcus Adrianus VAN DE KERKHOF
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND METHOD OF OPERATING THE APPARATUS
Publication number
20100296067
Publication date
Nov 25, 2010
ASML NETHERLANDS B.V.
Ivo Adam Johannes THOMAS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND METHOD OF GENERATING THE APPARATUS
Publication number
20100066988
Publication date
Mar 18, 2010
ASML NETHERLANDS B.V.
Jeroen Peter Johannes Bruijstens
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND A METHOD OF OPERATING THE APPARATUS
Publication number
20100066987
Publication date
Mar 18, 2010
ASML NETHERLANDS B.V.
Jeroen Peter Johannes BRUIJSTENS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND METHOD
Publication number
20090316121
Publication date
Dec 24, 2009
ASML NETHERLANDS B.V.
Franciscus Johannes Joseph JANSSEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20090103062
Publication date
Apr 23, 2009
ASML NETHERLANDS B.V.
Marcus Adrianus VAN DE KERKHOF
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20090059192
Publication date
Mar 5, 2009
ASML NETHERLANDS B.V.
Marcel Beckers
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
System for flushing at least one internal space of an objective
Publication number
20020155384
Publication date
Oct 24, 2002
Carl-Zeiss-Stiftung trading as Carl Zeiss
Joachim Schroeder
G02 - OPTICS