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Sien G. Kang
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Tracy, CA, US
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last 30 patents
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Patent Grant
Apparatus and methods for minimizing as-deposited stress in tungste...
Patent number
6,130,159
Issue date
Oct 10, 2000
Genus, Inc.
Sien G. Kang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Methods for minimizing as-deposited stress in tungsten silicide films
Patent number
5,963,836
Issue date
Oct 5, 1999
Genus, Inc.
Sien G. Kang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Purge gas in wafer coating area selection
Patent number
5,447,570
Issue date
Sep 5, 1995
Genus, Inc.
Johannes J. Schmitz
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Film uniformity by selective pressure gradient control
Patent number
5,387,289
Issue date
Feb 7, 1995
Genus, Inc.
Johannes J. Schmitz
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Low-temperature low-stress blanket tungsten film
Patent number
5,272,112
Issue date
Dec 21, 1993
Genus, Inc.
Johannes J. Schmitz
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...