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Sih-Ling Yeh
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Sunnyvale, CA, US
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last 30 patents
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Patent Application
METHOD AND APPARATUS TO CLEAN SUBSTRATE WITH ATOMIZING NOZZLE
Publication number
20240408650
Publication date
Dec 12, 2024
Applied Materials, Inc.
Haosheng Wu
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
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Patent Application
STEAM GENERATION FOR CHEMICAL MECHANICAL POLISHING
Publication number
20240342855
Publication date
Oct 17, 2024
Applied Materials, Inc.
Chad Pollard
B24 - GRINDING POLISHING
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Patent Application
CLEANING OF CMP TEMPERATURE CONTROL SYSTEM
Publication number
20240042570
Publication date
Feb 8, 2024
Applied Materials, Inc.
Haosheng Wu
B24 - GRINDING POLISHING