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Sijbe Abraham Van Der Lei
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Veldhoven, NL
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Patents Grants
last 30 patents
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Patent Grant
Optical integrator for an illumination device
Patent number
6,733,165
Issue date
May 11, 2004
Carl Zeiss Semiconductor Manufacturing Technologies AG
Sijbe Abraham Van Der Lei
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
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Patent Grant
Lithographic projection apparatus
Patent number
6,348,303
Issue date
Feb 19, 2002
ASM Lithography B.V.
Sijbe A. H. Van Der Lei
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
Optical integrator for an illumination device
Publication number
20020126931
Publication date
Sep 12, 2002
CARL ZEISS SEMICONDUCTOR MANUFACTURING TECHNOLOGIES AG
Sijbe Abraham Van Der Lei
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC