Silvia De Dea

Person

San Diego, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Controlled fluid flow for cleaning an optical element
- Patent number 10,232,413
- Issue date Mar 19, 2019
- ASML Netherlands B.V.
- Silvia De Dea
- B08 - CLEANING
Information Patent Grant
Harsh environment optical element protection
- Patent number 10,185,234
- Issue date Jan 22, 2019
- ASML Netherlands B.V.
- Alexander I. Ershov
- G02 - OPTICS
Information Patent Grant
Light collector mirror carrier
- Patent number 9,844,804
- Issue date Dec 19, 2017
- ASML Netherlands B.V.
- Silvia De Dea
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Controlled fluid flow for cleaning an optical element
- Patent number 9,776,218
- Issue date Oct 3, 2017
- ASML Netherlands B.V.
- Silvia De Dea
- B08 - CLEANING
Information Patent Grant
Target material supply apparatus for an extreme ultraviolet light s...
- Patent number 9,632,418
- Issue date Apr 25, 2017
- ASML Netherlands B.V.
- Silvia De Dea
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Transport system for an extreme ultraviolet light source
- Patent number 9,560,730
- Issue date Jan 31, 2017
- ASML Netherlands B.V.
- Silvia De Dea
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Transport system for an extreme ultraviolet light source
- Patent number 9,557,650
- Issue date Jan 31, 2017
- ASML Netherlands B.V.
- Silvia De Dea
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Target material supply apparatus for an extreme ultraviolet light s...
- Patent number 9,392,678
- Issue date Jul 12, 2016
- ASML Netherlands B.V.
- Silvia De Dea
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Light collector mirror cleaning
- Patent number 9,073,098
- Issue date Jul 7, 2015
- ASML Netherlands B.V.
- Silvia De Dea
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Systems and methods for optics cleaning in an EUV light source
- Patent number 9,000,404
- Issue date Apr 7, 2015
- ASML Netherlands, B.V.
- Alexander N. Bykanov
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Filter for material supply apparatus
- Patent number 8,816,305
- Issue date Aug 26, 2014
- ASML Netherlands B.V.
- Silvia De Dea
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Systems and methods for optics cleaning in an EUV light source
- Patent number 8,633,459
- Issue date Jan 21, 2014
- Cymer, LLC
- Alexander N. Bykanov
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
CONTROLLED FLUID FLOW FOR CLEANING AN OPTICAL ELEMENT
- Publication number 20170361359
- Publication date Dec 21, 2017
- ASML NETHERLANDS B.V.
- Silvia De Dea
- B08 - CLEANING
Information Patent Application
CONTROLLED FLUID FLOW FOR CLEANING AN OPTICAL ELEMENT
- Publication number 20170036252
- Publication date Feb 9, 2017
- ASML NETHERLANDS B.V.
- Silvia De Dea
- B08 - CLEANING
Information Patent Application
TARGET MATERIAL SUPPLY APPARATUS FOR AN EXTREME ULTRAVIOLET LIGHT S...
- Publication number 20160274466
- Publication date Sep 22, 2016
- ASML NETHERLANDS B.V.
- Silvia De Dea
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
TRANSPORT SYSTEM FOR AN EXTREME ULTRAVIOLET LIGHT SOURCE
- Publication number 20150282287
- Publication date Oct 1, 2015
- ASML NETHERLANDS B.V.
- Silvia De Dea
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Light Collector Mirror Carrier
- Publication number 20150273542
- Publication date Oct 1, 2015
- ASML NETHERLANDS B.V.
- Silvia De Dea
- B08 - CLEANING
Information Patent Application
TRANSPORT SYSTEM FOR AN EXTREME ULTRAVIOLET LIGHT SOURCE
- Publication number 20150069273
- Publication date Mar 12, 2015
- CYMER, LLC
- Silvia De Dea
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
SYSTEMS AND METHODS FOR OPTICS CLEANING IN AN EUV LIGHT SOURCE
- Publication number 20140110609
- Publication date Apr 24, 2014
- CYMER, LLC
- Alexander N. Bykanov
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
TARGET MATERIAL SUPPLY APPARATUS FOR AN EXTREME ULTRAVIOLET LIGHT S...
- Publication number 20140102875
- Publication date Apr 17, 2014
- Silvia De Dea
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HARSH ENVIRONMENT OPTICAL ELEMENT PROTECTION
- Publication number 20140098413
- Publication date Apr 10, 2014
- CYMER INC.
- Alexander I. ERSHOV
- G02 - OPTICS
Information Patent Application
Light Collector Mirror Cleaning
- Publication number 20130306110
- Publication date Nov 21, 2013
- Cymer, Inc.
- Silvia De Dea
- B08 - CLEANING
Information Patent Application
Filter for Material Supply Apparatus
- Publication number 20130153603
- Publication date Jun 20, 2013
- Cymer, Inc.
- Silvia De Dea
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
SYSTEMS AND METHODS FOR OPTICS CLEANING IN AN EUV LIGHT SOURCE
- Publication number 20120223256
- Publication date Sep 6, 2012
- Cymer, Inc.
- Alexander N. Bykanov
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Silvia De Dea

Person

Patents Grantslast 30 patents

Controlled fluid flow for cleaning an optical element

Harsh environment optical element protection

Light collector mirror carrier

Controlled fluid flow for cleaning an optical element

Target material supply apparatus for an extreme ultraviolet light s...

Transport system for an extreme ultraviolet light source

Transport system for an extreme ultraviolet light source

Target material supply apparatus for an extreme ultraviolet light s...

Light collector mirror cleaning

Systems and methods for optics cleaning in an EUV light source

Filter for material supply apparatus

Systems and methods for optics cleaning in an EUV light source

Patents Applicationslast 30 patents

CONTROLLED FLUID FLOW FOR CLEANING AN OPTICAL ELEMENT

CONTROLLED FLUID FLOW FOR CLEANING AN OPTICAL ELEMENT

TARGET MATERIAL SUPPLY APPARATUS FOR AN EXTREME ULTRAVIOLET LIGHT S...

TRANSPORT SYSTEM FOR AN EXTREME ULTRAVIOLET LIGHT SOURCE

Light Collector Mirror Carrier

TRANSPORT SYSTEM FOR AN EXTREME ULTRAVIOLET LIGHT SOURCE

SYSTEMS AND METHODS FOR OPTICS CLEANING IN AN EUV LIGHT SOURCE

TARGET MATERIAL SUPPLY APPARATUS FOR AN EXTREME ULTRAVIOLET LIGHT S...

HARSH ENVIRONMENT OPTICAL ELEMENT PROTECTION

Light Collector Mirror Cleaning

Filter for Material Supply Apparatus

SYSTEMS AND METHODS FOR OPTICS CLEANING IN AN EUV LIGHT SOURCE