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Silvia R. AGUILAR
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San Jose, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Halogen removal module and associated systems and methods
Patent number
10,903,065
Issue date
Jan 26, 2021
Lam Research Corporation
Travis R. Taylor
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Stacked wafer cassette loading system
Patent number
9,698,036
Issue date
Jul 4, 2017
Lam Research Corporation
Silvia R. Aguilar
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Halogen Removal Module and Associated Systems and Methods
Publication number
20180330942
Publication date
Nov 15, 2018
LAM RESEARCH CORPORATION
Travis R. Taylor
B08 - CLEANING
Information
Patent Application
STACKED WAFER CASSETTE LOADING SYSTEM
Publication number
20170133255
Publication date
May 11, 2017
LAM RESEARCH CORPORATION
Silvia R. AGUILAR
H01 - BASIC ELECTRIC ELEMENTS