Simon J. Cohen

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Pleasanton, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Four-mirror extreme ultraviolet (EUV) lithography projection system
- Patent number 6,142,641
- Issue date Nov 7, 2000
- Ultratech Stepper, Inc.
- Simon J Cohen
- G02 - OPTICS
Information Patent Grant
Critical illumination condenser for x-ray lithography
- Patent number 5,737,137
- Issue date Apr 7, 1998
- The Regents of the University of California
- Simon J. Cohen
- G02 - OPTICS