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Simon McClatchie
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Fremont, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Pre-planarization system and method
Patent number
8,403,727
Issue date
Mar 26, 2013
Lam Research Corporation
Fred C. Redeker
B24 - GRINDING POLISHING
Information
Patent Grant
Methods and systems for a stress-free cleaning a surface of a subst...
Patent number
7,129,167
Issue date
Oct 31, 2006
Lam Research Corporation
Andrew D. Bailey, III
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and method for distributing a polishing fluid
Patent number
7,040,970
Issue date
May 9, 2006
Lam Research Corporation
Simon McClatchie
B24 - GRINDING POLISHING
Information
Patent Grant
Methods of and apparatus for controlling polishing surface characte...
Patent number
7,040,954
Issue date
May 9, 2006
Lam Research Corporation
Simon McClatchie
B24 - GRINDING POLISHING
Information
Patent Grant
Method and apparatus of a variable height and controlled fluid flow...
Patent number
6,988,934
Issue date
Jan 24, 2006
Lam Research Corporation
Gregory C. Lee
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
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Patent Application
Apparatus and method for distributing a polishing fluid
Publication number
20060014478
Publication date
Jan 19, 2006
Simon McClatchie
B24 - GRINDING POLISHING