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Ion implantation beam monitor
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Issue date Nov 11, 2003
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Applied Materials, Inc.
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Robert John Mitchell
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H01 - BASIC ELECTRIC ELEMENTS
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Ion beam generation apparatus
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Patent number 6,559,454
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Issue date May 6, 2003
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Applied Materials, Inc.
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Adrian John Murrell
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H01 - BASIC ELECTRIC ELEMENTS
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Ion beam apparatus
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Patent number 5,920,076
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Issue date Jul 6, 1999
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Applied Materials, Inc.
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David Richard Burgin
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H01 - BASIC ELECTRIC ELEMENTS