Simon Ruffell

Person

South Hamilton, MA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate halo arrangement for improved process uniformity
- Patent number 12,106,943
- Issue date Oct 1, 2024
- Applied Materials, Inc.
- Jay R. Wallace
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Techniques to engineer nanoscale patterned features using ions
- Patent number 11,908,691
- Issue date Feb 20, 2024
- Applied Materials, Inc.
- Simon Ruffell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Temperature controlled/electrically biased wafer surround
- Patent number 11,664,193
- Issue date May 30, 2023
- Applied Materials, Inc.
- Kevin R. Anglin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-zone platen temperature control
- Patent number 11,646,213
- Issue date May 9, 2023
- Applied Materials, Inc.
- Kevin R. Anglin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Techniques and apparatus for unidirectional hole elongation using a...
- Patent number 11,640,909
- Issue date May 2, 2023
- Applied Materials, Inc.
- Kevin Anglin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Techniques to engineer nanoscale patterned features using ions
- Patent number 11,488,823
- Issue date Nov 1, 2022
- Varian Semiconductor Equipment Associates, Inc.
- Simon Ruffell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Techniques and apparatus for elongation patterning using angled ion...
- Patent number 11,127,593
- Issue date Sep 21, 2021
- Varian Semiconductor Equipment Associates, Inc.
- Kevin R. Anglin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Techniques to engineer nanoscale patterned features using ions
- Patent number 11,043,380
- Issue date Jun 22, 2021
- Varian Semiconductor Equipment Associates, Inc.
- Simon Ruffell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Techniques for processing substrates using directional reactive ion...
- Patent number 10,971,368
- Issue date Apr 6, 2021
- Varian Semiconductor Equipment Associates, Inc.
- Steven R. Sherman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
In-situ beam profile metrology
- Patent number 10,665,421
- Issue date May 26, 2020
- Applied Materials, Inc.
- Tsung-Liang Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Filling a cavity in a substrate using sputtering and deposition
- Patent number 10,546,730
- Issue date Jan 28, 2020
- Varian Semiconductor Equipment Associates, Inc.
- Simon Ruffell
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Techniques for manipulating patterned features using ions
- Patent number 10,381,232
- Issue date Aug 13, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Simon Ruffell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for carbon film deposition profile control
- Patent number 10,280,512
- Issue date May 7, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Alex Tsung-Liang Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Techniques for forming patterned features using directional ions
- Patent number 10,229,832
- Issue date Mar 12, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Steven R. Sherman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Three dimensional structure fabrication control using novel process...
- Patent number 10,222,202
- Issue date Mar 5, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Morgan D. Evans
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Non-uniform gate oxide thickness for DRAM device
- Patent number 10,204,909
- Issue date Feb 12, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Simon Ruffell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
FinFet spacer etch with no fin recess and no gate-spacer pull-down
- Patent number 10,109,494
- Issue date Oct 23, 2018
- Varian Semiconductor Equipment Associates, Inc.
- Simon Ruffell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Techniques to engineer nanoscale patterned features using ions
- Patent number 10,008,384
- Issue date Jun 26, 2018
- Varian Semiconductor Equipment Associates, Inc.
- Simon Ruffell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Techniques for manipulating patterned features using ions
- Patent number 9,984,889
- Issue date May 29, 2018
- Varian Semiconductor Equipment Associates, Inc.
- Simon Ruffell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Techniques for processing substrates using directional reactive ion...
- Patent number 9,934,981
- Issue date Apr 3, 2018
- Varian Semiconductor Equipment Associates, Inc.
- Steven R. Sherman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High efficiency apparatus and method for depositing a layer on a th...
- Patent number 9,929,015
- Issue date Mar 27, 2018
- Varian Semiconductor Equipment Associates, Inc.
- Thomas R. Omstead
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for selectively depositing a layer on a three dimensional st...
- Patent number 9,847,228
- Issue date Dec 19, 2017
- Varian Semiconductor Equipment Associates, Inc.
- Simon Ruffell
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
FinFET spacer etch with no fin recess and no gate-spacer pull-down
- Patent number 9,589,811
- Issue date Mar 7, 2017
- Varian Semiconductor Equipment Associates, Inc.
- Simon Ruffell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for selectively depositing a layer on a three dimensional st...
- Patent number 9,453,279
- Issue date Sep 27, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Simon Ruffell
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Techniques for forming angled structures for reduced defects in het...
- Patent number 9,287,123
- Issue date Mar 15, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Swaminathan Srinivasan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Magnetic memory and method of fabrication
- Patent number 9,082,949
- Issue date Jul 14, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Alexander C. Kontos
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Compound semiconductor growth using ion implantation
- Patent number 9,023,722
- Issue date May 5, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Morgan D. Evans
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Magnetic memory and method of fabrication
- Patent number 8,946,836
- Issue date Feb 3, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Alexander C. Kontos
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of implanting high aspect ratio features
- Patent number 8,846,508
- Issue date Sep 30, 2014
- Varian Semiconductor Equipment Associates, Inc.
- Jonathan Gerald England
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Multi-Zone Platen Temperature Control
- Publication number 20230238264
- Publication date Jul 27, 2023
- Applied Materials, Inc.
- Kevin R. Anglin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TECHNIQUES AND APPARATUS FOR UNIDIRECTIONAL HOLE ELONGATION USING A...
- Publication number 20230223269
- Publication date Jul 13, 2023
- Applied Materials, Inc.
- Kevin Anglin
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
TECHNIQUES TO ENGINEER NANOSCALE PATTERNED FEATURES USING IONS
- Publication number 20230020164
- Publication date Jan 19, 2023
- Varian Semiconductor Equipment Associates, Inc.
- Simon Ruffell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE HALO ARRANGEMENT FOR IMPROVED PROCESS UNIFORMITY
- Publication number 20220384156
- Publication date Dec 1, 2022
- Applied Materials, Inc.
- Jay R. Wallace
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Temperature Controlled/Electrically Biased Wafer Surround
- Publication number 20220246397
- Publication date Aug 4, 2022
- Applied Materials, Inc.
- Kevin R. Anglin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TECHNIQUES AND APPARATUS FOR ELONGATION PATTERNING USING ANGLED ION...
- Publication number 20210375626
- Publication date Dec 2, 2021
- Varian Semiconductor Equipment Associates, Inc.
- Kevin R. Anglin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Multi-Zone Platen Temperature Control
- Publication number 20210343550
- Publication date Nov 4, 2021
- Applied Materials, Inc.
- Kevin R. Anglin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TECHNIQUES TO ENGINEER NANOSCALE PATTERNED FEATURES USING IONS
- Publication number 20210166936
- Publication date Jun 3, 2021
- Varian Semiconductor Equipment Associates, Inc.
- Simon Ruffell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TECHNIQUES AND APPARATUS FOR UNIDIRECTIONAL HOLE ELONGATION USING A...
- Publication number 20200194271
- Publication date Jun 18, 2020
- Applied Materials, Inc.
- Kevin Anglin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
In-situ Beam Profile Metrology
- Publication number 20200118790
- Publication date Apr 16, 2020
- Applied Materials, Inc.
- Tsung-Liang Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILLING A CAVITY IN A SUBSTRATE USING SPUTTERING AND DEPOSITION
- Publication number 20200090909
- Publication date Mar 19, 2020
- Varian Semiconductor Equipment Associates, Inc.
- Simon Ruffell
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TECHNIQUES AND APPARATUS FOR ELONGATION PATTERNING USING ANGLED ION...
- Publication number 20190355581
- Publication date Nov 21, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Kevin R. Anglin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE HALO ARRANGEMENT FOR IMPROVED PROCESS UNIFORMITY
- Publication number 20190272983
- Publication date Sep 5, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Jay Wallace
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THREE DIMENSIONAL STRUCTURE FABRICATION CONTROL USING NOVEL PROCESS...
- Publication number 20180340769
- Publication date Nov 29, 2018
- Varian Semiconductor Equipment Associates, Inc.
- Morgan D. Evans
- G01 - MEASURING TESTING
Information Patent Application
TECHNIQUES TO ENGINEER NANOSCALE PATTERNED FEATURES USING IONS
- Publication number 20180330944
- Publication date Nov 15, 2018
- Varian Semiconductor Equipment Associates, Inc.
- Simon Ruffell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TECHNIQUES FOR MANIPULATING PATTERNED FEATURES USING IONS
- Publication number 20180261463
- Publication date Sep 13, 2018
- Varian Semiconductor Equipment Associates, Inc.
- Simon Ruffell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TECHNIQUES FOR PROCESSING SUBSTRATES USING DIRECTIONAL REACTIVE ION...
- Publication number 20180182637
- Publication date Jun 28, 2018
- Varian Semiconductor Equipment Associates, Inc.
- Steven R. Sherman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TECHNIQUES FOR FORMING PATTERNED FEATURES USING DIRECTIONAL IONS
- Publication number 20180082844
- Publication date Mar 22, 2018
- Steven R. Sherman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILLING A CAVITY IN A SUBSTRATE USING SPUTTERING AND DEPOSITION
- Publication number 20170330796
- Publication date Nov 16, 2017
- Simon Ruffell
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TECHNIQUES FOR MANIPULATING PATTERNED FEATURES USING IONS
- Publication number 20170263460
- Publication date Sep 14, 2017
- Simon Ruffell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
NON-UNIFORM GATE OXIDE THICKNESS FOR DRAM DEVICE
- Publication number 20170179133
- Publication date Jun 22, 2017
- Varian Semiconductor Equipment Associates, Inc.
- Simon Ruffell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FINFET SPACER ETCH WITH NO FIN RECESS AND NO GATE-SPACER PULL-DOWN
- Publication number 20170133491
- Publication date May 11, 2017
- Simon Ruffell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR CARBON FILM DEPOSITION PROFILE CONTROL
- Publication number 20170029950
- Publication date Feb 2, 2017
- Varian Semiconductor Equipment Associates, Inc.
- Alex Tsung-Liang Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TECHNIQUES TO ENGINEER NANOSCALE PATTERNED FEATURES USING IONS
- Publication number 20160379816
- Publication date Dec 29, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Simon Ruffell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FINFET SPACER ETCH WITH NO FIN RECESS AND NO GATE-SPACER PULL-DOWN
- Publication number 20160379832
- Publication date Dec 29, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Simon Ruffell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR SELECTIVELY DEPOSITING A LAYER ON A THREE DIMENSIONAL ST...
- Publication number 20160379827
- Publication date Dec 29, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Simon Ruffell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH EFFICIENCY APPARATUS AND METHOD FOR DEPOSITING A LAYER ON A TH...
- Publication number 20160005594
- Publication date Jan 7, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Thomas R. Omstead
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TECHNIQUES FOR FORMING ANGLED STRUCTURES FOR REDUCED DEFECTS IN HET...
- Publication number 20150311073
- Publication date Oct 29, 2015
- Varian Semiconductor Equipment Associates, Inc.
- SWAMINATHAN SRINIVASAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TECHNIQUES FOR PROCESSING SUBSTRATES USING DIRECTIONAL REACTIVE ION...
- Publication number 20150083581
- Publication date Mar 26, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Steven R. Sherman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MAGNETIC MEMORY AND METHOD OF FABRICATION
- Publication number 20130288394
- Publication date Oct 31, 2013
- Varian Semiconductor Equipment Associates, Inc.
- Alexander C. Kontos
- H01 - BASIC ELECTRIC ELEMENTS

Simon Ruffell

Person

Patents Grantslast 30 patents

Substrate halo arrangement for improved process uniformity

Techniques to engineer nanoscale patterned features using ions

Temperature controlled/electrically biased wafer surround

Multi-zone platen temperature control

Techniques and apparatus for unidirectional hole elongation using a...

Techniques to engineer nanoscale patterned features using ions

Techniques and apparatus for elongation patterning using angled ion...

Techniques to engineer nanoscale patterned features using ions

Techniques for processing substrates using directional reactive ion...

In-situ beam profile metrology

Filling a cavity in a substrate using sputtering and deposition

Techniques for manipulating patterned features using ions

Apparatus and method for carbon film deposition profile control

Techniques for forming patterned features using directional ions

Three dimensional structure fabrication control using novel process...

Non-uniform gate oxide thickness for DRAM device

FinFet spacer etch with no fin recess and no gate-spacer pull-down

Techniques to engineer nanoscale patterned features using ions

Techniques for manipulating patterned features using ions

Techniques for processing substrates using directional reactive ion...

High efficiency apparatus and method for depositing a layer on a th...

Method for selectively depositing a layer on a three dimensional st...

FinFET spacer etch with no fin recess and no gate-spacer pull-down

Method for selectively depositing a layer on a three dimensional st...

Techniques for forming angled structures for reduced defects in het...

Magnetic memory and method of fabrication

Compound semiconductor growth using ion implantation

Magnetic memory and method of fabrication

Method of implanting high aspect ratio features

Patents Applicationslast 30 patents

Multi-Zone Platen Temperature Control

TECHNIQUES AND APPARATUS FOR UNIDIRECTIONAL HOLE ELONGATION USING A...

TECHNIQUES TO ENGINEER NANOSCALE PATTERNED FEATURES USING IONS

SUBSTRATE HALO ARRANGEMENT FOR IMPROVED PROCESS UNIFORMITY

Temperature Controlled/Electrically Biased Wafer Surround

TECHNIQUES AND APPARATUS FOR ELONGATION PATTERNING USING ANGLED ION...

Multi-Zone Platen Temperature Control

TECHNIQUES TO ENGINEER NANOSCALE PATTERNED FEATURES USING IONS

TECHNIQUES AND APPARATUS FOR UNIDIRECTIONAL HOLE ELONGATION USING A...

In-situ Beam Profile Metrology

FILLING A CAVITY IN A SUBSTRATE USING SPUTTERING AND DEPOSITION

TECHNIQUES AND APPARATUS FOR ELONGATION PATTERNING USING ANGLED ION...

SUBSTRATE HALO ARRANGEMENT FOR IMPROVED PROCESS UNIFORMITY

THREE DIMENSIONAL STRUCTURE FABRICATION CONTROL USING NOVEL PROCESS...

TECHNIQUES TO ENGINEER NANOSCALE PATTERNED FEATURES USING IONS

TECHNIQUES FOR MANIPULATING PATTERNED FEATURES USING IONS

TECHNIQUES FOR PROCESSING SUBSTRATES USING DIRECTIONAL REACTIVE ION...

TECHNIQUES FOR FORMING PATTERNED FEATURES USING DIRECTIONAL IONS

FILLING A CAVITY IN A SUBSTRATE USING SPUTTERING AND DEPOSITION

TECHNIQUES FOR MANIPULATING PATTERNED FEATURES USING IONS

NON-UNIFORM GATE OXIDE THICKNESS FOR DRAM DEVICE

FINFET SPACER ETCH WITH NO FIN RECESS AND NO GATE-SPACER PULL-DOWN

APPARATUS AND METHOD FOR CARBON FILM DEPOSITION PROFILE CONTROL

TECHNIQUES TO ENGINEER NANOSCALE PATTERNED FEATURES USING IONS

FINFET SPACER ETCH WITH NO FIN RECESS AND NO GATE-SPACER PULL-DOWN

METHOD FOR SELECTIVELY DEPOSITING A LAYER ON A THREE DIMENSIONAL ST...

HIGH EFFICIENCY APPARATUS AND METHOD FOR DEPOSITING A LAYER ON A TH...

TECHNIQUES FOR FORMING ANGLED STRUCTURES FOR REDUCED DEFECTS IN HET...

TECHNIQUES FOR PROCESSING SUBSTRATES USING DIRECTIONAL REACTIVE ION...

MAGNETIC MEMORY AND METHOD OF FABRICATION