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San Francisco, CA, US
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Patent Grant
Enhanced scanning control of charged particle beam systems
Patent number
7,230,240
Issue date
Jun 12, 2007
Credence Systems Corporation
James Siebert
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
Enhanced scanning control of charged particle beam systems
Publication number
20060043312
Publication date
Mar 2, 2006
James Siebert
H01 - BASIC ELECTRIC ELEMENTS