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last 30 patents
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Patent Grant
Method for post-etch cleans
Patent number
8,058,181
Issue date
Nov 15, 2011
Novellus Systems, Inc.
David L. Chen
B08 - CLEANING
Information
Patent Grant
Method for post-etch cleans
Patent number
7,569,492
Issue date
Aug 4, 2009
Novellus Systems, Inc.
David L. Chen
B08 - CLEANING
Information
Patent Grant
Methods for post etch cleans
Patent number
7,390,755
Issue date
Jun 24, 2008
Novellus Systems, Inc.
David L. Chen
B08 - CLEANING